Title:
SENSOR HEAD FOR CRYSTAL-OSCILLATION-TYPE FILM THICKNESS MONITOR
Document Type and Number:
WIPO Patent Application WO/2019/003499
Kind Code:
A1
Abstract:
Provided is a sensor head for a crystal-oscillation-type film thickness monitor that is capable of suppressing the stepping out of a stepper motor and the increase of motor excitation current. The sensor head comprises a sensor head body 1 having a motor Sm disposed therein, a holder 2 that has a plurality of crystal oscillation elements Co placed on the upper surface therof and is rotationally driven by the motor, and a mask body 3 that is attached to the sensor head body so as to cover the upper surface of the holder and has a film formation window 31 that is faced by one of the crystal oscillation elements. The part of the sensor head body positioned directly below the film formation window has a fixed first electrode 4 and second electrodes 5 that are electrically connected to each of the crystal oscillation elements and protrude from the bottom surface of the holder. When the holder rotates to a phase where one crystal oscillation element and the film formation window are vertically aligned, the first electrode and second electrode, which comprise the same metal, touch and are electrically connected. A lubricant supply means 4b for supplying solid lubricant to the surface of a second electrode before the same touches the first electrode is provided so as to be in front in the rotation direction of the holder.
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Inventors:
OGUMA YOUSUKE (JP)
MAEDA AKIHIRO (JP)
KAIDA YUKI (JP)
KOTAKA MANABU (JP)
OKAMURA KOU (JP)
MAEDA AKIHIRO (JP)
KAIDA YUKI (JP)
KOTAKA MANABU (JP)
OKAMURA KOU (JP)
Application Number:
PCT/JP2018/008466
Publication Date:
January 03, 2019
Filing Date:
March 06, 2018
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
G01B17/02; C23C14/52
Domestic Patent References:
| WO2010124020A1 | 2010-10-28 |
Foreign References:
| JP3953505B2 | 2007-08-08 | |||
| JP2014070969A | 2014-04-21 | |||
| JPH03153872A | 1991-07-01 | |||
| JP2007170831A | 2007-07-05 |
Attorney, Agent or Firm:
SEIGA PATENT AND TRADEMARK CORPORATION (JP)
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