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Patent Searching and Data


Title:
SENSOR HEAD
Document Type and Number:
WIPO Patent Application WO/2020/184102
Kind Code:
A1
Abstract:
A purpose of the present invention is to provide a sensor head that achieves improved measurement accuracy while reducing measurement time. A sensor head 100 comprises a case 1 including a first case section 2 having a lens 5 therein, a second case section 3 having an objective lens 7 therein, and a third case section 13 providing connection between the first case section 2 and the second case section 3. Inside the third case section 13, a mirror member 135 for folding light incident thereon from the lens 5 toward the objective lens 7 is disposed, and a hollow tube 310 providing communication between through holes respectively formed in the mirror member 135 and the objective lens 7 is provided.

Inventors:
FURUKAWA SHINYA (JP)
Application Number:
PCT/JP2020/006434
Publication Date:
September 17, 2020
Filing Date:
February 19, 2020
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
International Classes:
G01B11/00; G01C3/06
Domestic Patent References:
WO2009153067A22009-12-23
Foreign References:
JP2017021022A2017-01-26
JP2015143652A2015-08-06
JP2001235311A2001-08-31
US7477401B22009-01-13
JP2012208102A2012-10-25
JP2016165424A2016-09-15
Other References:
See also references of EP 3940336A4
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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