Title:
SENSOR AND SENSOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/228700
Kind Code:
A1
Abstract:
A sensor and a sensor manufacturing method. The sensor comprises two or more pressure sensing chips arranged in parallel in a first direction. The two or more pressure sensing chips comprise: a first pressure sensing chip (100) comprising a first pressure sensing film (110) and a first side wall (120) connected to the periphery of the first pressure sensing film (110), the first side wall (120) enclosing a first opening (130); and a second pressure sensing chip (200) comprising a second pressure sensing film (210) and a second side wall (220) connected to the periphery of the second pressure sensing film (210), the second side wall (220) enclosing a second opening (230), the second opening (230) facing toward the first pressure sensing chip (100), and the first opening (130) facing away from the second pressure sensing chip (200). A pressure sensing beam (240) is further connected to the second pressure sensing film (210), the pressure sensing beam (240) extends out of the second opening (230) in the first direction, and the pressure sensing beam (240) and the first pressure sensing film (110) are arranged at a preset distance interval to enable the first pressure sensing film (110) to be in contact and connection with the pressure sensing beam (240) when deformed under force. The sensor and the sensor manufacturing method avoid the phenomenon of measuring a small pressure by using a relatively thick pressure sensing film, and thus the measurement precision of the sensor can be effectively improved.
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Inventors:
NIE YONGZHONG (CN)
Application Number:
PCT/CN2020/089796
Publication Date:
November 19, 2020
Filing Date:
May 12, 2020
Export Citation:
Assignee:
FATRI UNITED TESTING & CONTROL QUANZHOU TECH CO LTD (CN)
International Classes:
G01L1/22; G01L9/04
Foreign References:
| CN110319956A | 2019-10-11 | |||
| CN101578507A | 2009-11-11 | |||
| CN103314283A | 2013-09-18 | |||
| CN105241597A | 2016-01-13 | |||
| CN106768515A | 2017-05-31 | |||
| CN103017943A | 2013-04-03 | |||
| CN206291953U | 2017-06-30 | |||
| US20180340849A1 | 2018-11-29 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
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