Title:
SENSOR AND METHOD FOR SENSING THE POSITION OF THE SURFACE OF OBJECT, ALIGNER PROVIDED WITH THE SENSOR AND METHOD OF MANUFACTURING THE ALIGNER, AND METHOD OF MANUFACTURING DEVICES BY USING THE ALIGNER
Document Type and Number:
WIPO Patent Application WO/1998/057362
Kind Code:
A1
Abstract:
A sensor capable of sensing the surface of an object with high precision and at high speed, which forms a slit image at an angle to a pattern on the substrate surface and picks up a secondary image of the slit image formed by the light reflected from the substrate with an imaging device. The imaging device is so disposed that the longitudinal direction of the secondary image of the slit and the alignment direction of linearly aligned imaging elements are at an angle to each other. The secondary image of the slit is blurred longitudinally by the action of a special optical element to average information on the optical characteristics of the substrate surface. Based on the linear image information obtained from the imaging device, the sensor can sense the position of the surface of an object along the normal to that surface, which can be realized also by utilizing two beams of light that are coherent with each other.
Inventors:
MIZUTANI HIDEO (JP)
Application Number:
PCT/JP1998/002534
Publication Date:
December 17, 1998
Filing Date:
June 09, 1998
Export Citation:
Assignee:
NIKON CORP (JP)
MIZUTANI HIDEO (JP)
MIZUTANI HIDEO (JP)
International Classes:
G03F9/00; (IPC1-7): H01L21/027; G03F7/20
Foreign References:
| JPH09115807A | 1997-05-02 | |||
| JPH0636992A | 1994-02-10 | |||
| JPH07153670A | 1995-06-16 |
Other References:
See also references of EP 1001457A4
Attorney, Agent or Firm:
Hasegawa, Yoshiki (6F. Kyobashi National Building, 13-10,
Kyobashi 2-chom, Chuo-ku Tokyo, JP)
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