Title:
PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2013/047799
Kind Code:
A1
Abstract:
The present invention relates to a physical/chemical sensor, a physical/chemical phenomenon sensing device, and a method for manufacturing the same with which a minute change in surface stress may be detected, and size reduction and array configuration may be enabled. In the sensor of the present invention, a hollow portion (3) is formed at a surface of a light receiving surface (1a) of a photo diode (1). The sensor comprises a membrane portion (2) which is oppositely disposed, and the hollow portion is isolated airtightly and watertightly. The membrane portion has light permeability and flexibility, and forms a Fabry-Perot resonator with the surface of the light receiving surface. The sensing device of the present invention comprises a reference sensor, which comprises no hollow portion, in addition to the sensor. The manufacturing method of the present invention comprises forming a sacrificial layer at the light receiving surface of the photo diode, laminating an area other than a surface of the sacrificial surface with a protective film, forming the membrane portion at a membrane portion configuration area other than an etching target area, etching the sacrificial layer, and coating the etching target area.
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Inventors:
TAKAHASHI KAZUHIRO (JP)
SAWADA KAZUAKI (JP)
OYAMA HIROKI (JP)
SAWADA KAZUAKI (JP)
OYAMA HIROKI (JP)
Application Number:
PCT/JP2012/075182
Publication Date:
April 04, 2013
Filing Date:
September 28, 2012
Export Citation:
Assignee:
NAT UNIV CORP TOYOHASHI UNIV (JP)
International Classes:
G01N33/543; G01N21/27; G01N37/00
Foreign References:
| JP2001228326A | 2001-08-24 | |||
| JP2000028931A | 2000-01-28 | |||
| JP2009210312A | 2009-09-17 | |||
| JP2007112075A | 2007-05-10 | |||
| JP2007155965A | 2007-06-21 | |||
| JP2008076182A | 2008-04-03 | |||
| JP2007232402A | 2007-09-13 | |||
| JP2011027780A | 2011-02-10 | |||
| JP2001228022A | 2001-08-24 | |||
| JP2003014641A | 2003-01-15 |
Other References:
TIANHUA ZHANG ET AL.: "A white-light source operated polymer-based micromachined Fabry- Perot chemo/biosensor", PROCEEDINGS OF THE 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, 5 January 2009 (2009-01-05), pages 181 - 184, XP031470663
J. R. BARNES; R. J. STEPHENSON; M. E. WELLAND; C. GERBER; J. K. GIMZEWSKLI: "Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device", NATURE, vol. 372, 1994, pages 79 - 81, XP001172912, DOI: doi:10.1038/372079a0
D. A. RAORANE; M. D. LIM; F. F. CHEN; C. S. CRAIK; A. MAJUMDAR: "Quantitative and label-free technique for measuring protease activity and inhibition using a rnicrofluidic cantilever array", NANO LETTERS, vol. 8, 2008, pages 2968 - 2974
X. YU; Y TANG; H. ZHANG; T. LI; W. WANG: "Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits", IEEE SENSORS JOURNAL, vol. 7, no. 4, 2007, pages 489 - 495, XP011168291, DOI: doi:10.1109/JSEN.2007.891938
G. YOSHIKAWA; T. AKIYAMA; S. GAUTSCH; P. VETTIGER; H. ROHRER: "Nanomechanical membrane-type surface stress sensor", NANO LETTERS, vol. 11, no. 3, 2011, pages 1044 - 1048
S. SATYANARAYANA; D. T. MCCORMICK; A. MAJUMDAR: "Parylene micro membrane capacitive sensor array for chemical and biological sensing", SENSORS AND ACTUATORS B, vol. 115, 2006, pages 494 - 502, XP025111931, DOI: doi:10.1016/j.snb.2005.10.013
M. CHA; J. SHIN; J.-H. KIM; KIM, J. CHOI; N. LEE; B.-G. KIM; J. LEE: "Biomolecular detection with a thin membrane transducer", LAB ON A CHIP, vol. 8, 2008, pages 932 - 937
J. R. BARNES; R. J. STEPHENSON; M. E. WELLAND; C. GERBER; J. K. GIMZEWSKLI: "Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device", NATURE, vol. 372, 1994, pages 79 - 81, XP001172912, DOI: doi:10.1038/372079a0
D. A. RAORANE; M. D. LIM; F. F. CHEN; C. S. CRAIK; A. MAJUMDAR: "Quantitative and label-free technique for measuring protease activity and inhibition using a rnicrofluidic cantilever array", NANO LETTERS, vol. 8, 2008, pages 2968 - 2974
X. YU; Y TANG; H. ZHANG; T. LI; W. WANG: "Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits", IEEE SENSORS JOURNAL, vol. 7, no. 4, 2007, pages 489 - 495, XP011168291, DOI: doi:10.1109/JSEN.2007.891938
G. YOSHIKAWA; T. AKIYAMA; S. GAUTSCH; P. VETTIGER; H. ROHRER: "Nanomechanical membrane-type surface stress sensor", NANO LETTERS, vol. 11, no. 3, 2011, pages 1044 - 1048
S. SATYANARAYANA; D. T. MCCORMICK; A. MAJUMDAR: "Parylene micro membrane capacitive sensor array for chemical and biological sensing", SENSORS AND ACTUATORS B, vol. 115, 2006, pages 494 - 502, XP025111931, DOI: doi:10.1016/j.snb.2005.10.013
M. CHA; J. SHIN; J.-H. KIM; KIM, J. CHOI; N. LEE; B.-G. KIM; J. LEE: "Biomolecular detection with a thin membrane transducer", LAB ON A CHIP, vol. 8, 2008, pages 932 - 937
Attorney, Agent or Firm:
IKAWA Hirofumi et al. (JP)
Hirofumi Ikawa (JP)
Hirofumi Ikawa (JP)
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