Title:
SENSOR SUBSTRATE, AIR VELOCITY MEASUREMENT DEVICE, AND AIR VOLUME MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/105753
Kind Code:
A2
Abstract:
Provided is a sensor substrate which is capable of accurately measuring the temperature of an air stream using a second temperature sensor element, without being affected by a heat-generating element. Thermal separation of the second temperature sensor element 7 (second negative temperature coefficient thermistor) from the heat-generating element 5 (positive temperature coefficient thermistor) and a first temperature sensor element 6 (first negative temperature coefficient thermistor) is achieved by forming notches 4a, 4b in a substrate 1, mounting the heat-generating element 5 and the first temperature sensor element 6 to one side of the notches 4a, 4b, and mounting the second temperature sensor element 7 to the other side of the notches 4a, 4b.
Inventors:
KITAMURA AKIHIRO (JP)
Application Number:
PCT/JP2018/007907
Publication Date:
June 14, 2018
Filing Date:
March 01, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01F1/69; G01P5/12
Attorney, Agent or Firm:
KAWAMOTO, Takashi (JP)
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