Title:
SENSOR USABLE IN ULTRA PURE AND HIGHLY CORROSIVE ENVIRONMENTS
Document Type and Number:
WIPO Patent Application WO/2004/105091
Kind Code:
A2
Abstract:
The electrical pin lead structure and brazing technique of the present invention provide a brazed lead in a sensor that adheres well to a semiconductor substrate while facilitating lateral flexibility without joint fatigue or breakage. An advantage to this approach is the ability to both braze the pin lead to the diaphragm (14) and seal the diaphragm to the ceramic backing plate with a high temperature glass in a single process step.
Inventors:
Peterson, Tom (7020 Sandy Hook Circle, Chanhassen, MN, 55317, US)
Diaz Diaz, Jorge Andrés (1730 New Brighton Blvd. #223, Minneapolis, MN, 55416, US)
Cucci, Gerald R. (1201 Yale Place, Apt. #1907 Minneapolis, MN, 55403, US)
Diaz Diaz, Jorge Andrés (1730 New Brighton Blvd. #223, Minneapolis, MN, 55416, US)
Cucci, Gerald R. (1201 Yale Place, Apt. #1907 Minneapolis, MN, 55403, US)
Application Number:
PCT/US2004/015098
Publication Date:
December 02, 2004
Filing Date:
May 14, 2004
Export Citation:
Assignee:
ENTEGRIS, INC. (3500 Lyman Boulevard, Chaska, MN, 55318, US)
Peterson, Tom (7020 Sandy Hook Circle, Chanhassen, MN, 55317, US)
Diaz Diaz, Jorge Andrés (1730 New Brighton Blvd. #223, Minneapolis, MN, 55416, US)
Cucci, Gerald R. (1201 Yale Place, Apt. #1907 Minneapolis, MN, 55403, US)
Peterson, Tom (7020 Sandy Hook Circle, Chanhassen, MN, 55317, US)
Diaz Diaz, Jorge Andrés (1730 New Brighton Blvd. #223, Minneapolis, MN, 55416, US)
Cucci, Gerald R. (1201 Yale Place, Apt. #1907 Minneapolis, MN, 55403, US)
International Classes:
G01L9/00; G01L19/04; G01L19/06; (IPC1-7): H01L/
Attorney, Agent or Firm:
Jimenez, Jose W. (Patterson, Thuente Skaar & Christensen, P.A., 4800
IDS Center, 80 South Eighth Stree, Minneapolis MN, 55402-2100, US)
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