Title:
SENSOR
Document Type and Number:
WIPO Patent Application WO/2008/059757
Kind Code:
A1
Abstract:
A sensor is provided with a detecting element (28) having an acceleration detecting
section. The acceleration detecting section is provided with a spindle section
(18) connected to a fixed section (14) through a flexible section (16), a substrate
section (10) facing the spindle section (18), and an electrode section composed
of opposite electrodes (20, 22, 24, 26) arranged on the facing surfaces of the
spindle section (18) and the substrate section (10). Thus, displacement of
the spindle section (18) in an Z axis direction is suppressed, and detection accuracy
of acceleration in an X axis or Y axis is improved.
Inventors:
OHUCHI SATOSHI
NOZOE TOSHIYUKI
AIZAWA HIROYUKI
NOZOE TOSHIYUKI
AIZAWA HIROYUKI
Application Number:
PCT/JP2007/071760
Publication Date:
May 22, 2008
Filing Date:
November 09, 2007
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
OHUCHI SATOSHI
NOZOE TOSHIYUKI
AIZAWA HIROYUKI
OHUCHI SATOSHI
NOZOE TOSHIYUKI
AIZAWA HIROYUKI
International Classes:
G01P15/125; G01C19/56; G01C19/5607; G01C19/5719; G01P15/18
Foreign References:
| JPH05264577A | 1993-10-12 | |||
| JP2003329444A | 2003-11-19 | |||
| JP2006162314A | 2006-06-22 | |||
| JPH10177034A | 1998-06-30 | |||
| JP2001208546A | 2001-08-03 | |||
| JP2001074767A | 2001-03-23 |
Other References:
See also references of EP 2053413A4
Attorney, Agent or Firm:
IWAHASHI, Fumio et al. (1006, Oaza Kadom, Kadoma-shi Osaka 01, JP)
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