Title:
SEPARATION OF MASTER ELECTRODE AND SUBSTRATE IN ECPR
Document Type and Number:
WIPO Patent Application WO/2012/007522
Kind Code:
A3
Abstract:
Methods for separating a master electrode (101, 201) and a substrate (102, 202) in an ECPR process after printing are disclosed. The master electrode (101, 201) or the substrate (102, 202) is arranged on a first chuck (103, 104, 203, 204) and the other one of said master electrode (101, 201) and the substrate (102, 202) is arranged on a second chuck (103, 104, 203, 204. The master electrode (101, 201) and substrate (102, 202) have a planar interaction area during plating.
Inventors:
MOELLER PATRIK (SE)
FREDENBERG MIKAEL (SE)
UTTERBAECK TOMAS (SE)
SANTOS ANTONIO (SE)
CHAUVET JEAN-MICHEL (SE)
ROSEN DANIEL (SE)
SVENSSON STEFAN (SE)
FREDENBERG MIKAEL (SE)
UTTERBAECK TOMAS (SE)
SANTOS ANTONIO (SE)
CHAUVET JEAN-MICHEL (SE)
ROSEN DANIEL (SE)
SVENSSON STEFAN (SE)
Application Number:
PCT/EP2011/061992
Publication Date:
April 12, 2012
Filing Date:
July 13, 2011
Export Citation:
Assignee:
REPLISAURUS GROUP SAS (FR)
MOELLER PATRIK (SE)
FREDENBERG MIKAEL (SE)
UTTERBAECK TOMAS (SE)
SANTOS ANTONIO (SE)
CHAUVET JEAN-MICHEL (SE)
ROSEN DANIEL (SE)
SVENSSON STEFAN (SE)
MOELLER PATRIK (SE)
FREDENBERG MIKAEL (SE)
UTTERBAECK TOMAS (SE)
SANTOS ANTONIO (SE)
CHAUVET JEAN-MICHEL (SE)
ROSEN DANIEL (SE)
SVENSSON STEFAN (SE)
International Classes:
C25D19/00; C25D1/20; C25D5/02; C25D7/12; H01L21/00; H01L21/288; H01L21/67
Domestic Patent References:
| WO2007058603A1 | 2007-05-24 |
Foreign References:
| JP2010250940A | 2010-11-04 |
Attorney, Agent or Firm:
STRÖM & GULLIKSSON AB (Malmö, SE)
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