SERVICE ACTIVITY MANAGEMENT SYSTEM AND METHOD FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

WIPO Patent Application WO2005091779

A3

An activity management system, and a method of using thereof, is described for a service process in semiconductor manufacturing. The activity management system includes a data collection system configured to receive service activity data associated with at least one service component and a service operator, and relate the service activity data with at least one service account. Additionally, the activity management system includes a data storage system coupled to the data collection system and configured to store the service activity data. Furthermore, the activity management system includes a service action system coupled to the data collection system and the data storage system, and configured to perform at least one service function including service component repair, service component start-up, service component preventive maintenance, service component cleaning, service component revision (e.g., a field change notice), a service component enhancement (e.g., a continuous improvement notice), service component de­installation, a customer action plan, a project action plan, and service education.

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KAUFFMAN ERIC (US)
BROWN PAUL (US)

PCT/US2005/003466

April 27, 2006

February 07, 2005

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TOKYO ELECTRON LTD (JP)
KAUFFMAN ERIC (US)
BROWN PAUL (US)

G06Q10/00; (IPC1-7): G06F17/60

US6810406B2	2004-10-26
US4612620A	1986-09-16
US5195173A	1993-03-16
US5216612A	1993-06-01

See also references of EP 1735738A4

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