SERVO-TYPE VIBRATION DETECTOR AND EVALUATION METHOD FOR SERVO-TYPE VIBRATION DETECTOR

WIPO Patent Application WO/2023/112949

A1

In conventional servo-type acceleration sensors, it was necessary to configure the sensor within a narrow range in which the following three contradictory problems would be solved simultaneously: (1) reduction of a resonance peak; (2) improvement of responsiveness; and (3) improvement of sensor sensitivity. Therefore, there was a limit to the performance enhancement of such sensors. In the present invention, a mechanical damping action due to dynamic fluid pressure in an inter-electrode gap part is reduced by forming a circulation hole or a circulation groove in relative motion surfaces of electrodes and this damping action is replaced by an equivalent damping means by means of an electric circuit in a servo amplifier. As a result, it is possible to independently set the sensor sensitivity, which depends on the outer diameter of and the gap between the electrodes, and the sensor dynamic characteristics, which conventionally had a trade-off relationship with the sensor sensitivity.

JPH05215764	OPTICAL ACCELEROMETER AND OPTICAL ANGULAR ACCELEROMETER
JPS53110583	ACCELERATION METER
JP6262629	Inertia sensor

MARUYAMA TERUO (JP)
OKADA TAKUMI (JP)
TAKIMOTO HIROSHI (JP)
YAMAGUCHI SATOKI (JP)

PCT/JP2022/045991

June 22, 2023

December 14, 2022

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TOKKYOKIKI CORP (JP)

G01P15/13; G01H1/12; G01H11/06; G01P15/125

US20120063263A1	2012-03-15
US20090280594A1	2009-11-12
JP2014149234A	2014-08-21
US20130277771A1	2013-10-24
JPH0526903A	1993-02-05
US5023749A	1991-06-11
JP2007046927A	2007-02-22

NISHIMURA, Ryuhei et al. (JP)

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