Title:
A SHADOW MASK FOR ORGANIC LIGHT EMITTING DIODE MANUFACTURE
Document Type and Number:
WIPO Patent Application WO/2017/020272
Kind Code:
A1
Abstract:
A shadow mask (200) includes a frame (210) made of a metallic material, and one or more mask patterns (205) coupled to the frame (210), the one or more mask patterns (205) comprising a metallic material having a coefficient of thermal expansion less than or equal to about 14 microns/meter/degrees Celsius and having a plurality of openings (215) formed therein, the metallic material having a thickness of about 5 microns to about 50 microns and having a pitch tolerance between openings (215) of about +/-3 microns across a length of about 160 millimeters.
Inventors:
XI HUANG (CN)
BRIAN E LASSITER (US)
DIETER HAAS (DE)
BRIAN E LASSITER (US)
DIETER HAAS (DE)
Application Number:
PCT/CN2015/086106
Publication Date:
February 09, 2017
Filing Date:
August 05, 2015
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
XI HUANG (CN)
XI HUANG (CN)
International Classes:
C23C14/04; C25D1/10
Foreign References:
| CN103451598A | 2013-12-18 | |||
| CN102023474A | 2011-04-20 | |||
| CN1804138A | 2006-07-19 | |||
| TW201527560A | 2015-07-16 | |||
| JP2005206881A | 2005-08-04 |
Attorney, Agent or Firm:
LECOME INTELLECTUAL PROPERTY AGENT LTD. (CN)
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