Title:
SHAPE ACQUISITION METHOD, OBJECT MANAGEMENT METHOD AND WORK SUPPORT METHOD, AND SHAPE ACQUISITION SYSTEM AND WORK SUPPORT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/074684
Kind Code:
A1
Abstract:
This shape acquisition method comprises: acquiring information about tilt angles on one plane by using a plurality of sensors at respective measurement points on one plane of an object (step S1); and calculating the shape of one plane of the object by operations including function fitting using the discrete distribution of physical quantities associated with the acquired information about the tilt angles (step S2). Thus, the measurement management of the object can be accurately evaluated on one plane.
More Like This:
Inventors:
MIYAWAKI TAKASHI (JP)
Application Number:
PCT/JP2022/039727
Publication Date:
May 04, 2023
Filing Date:
October 25, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01B21/32; E02D17/00; G01C15/00
Foreign References:
JP2019052467A | 2019-04-04 | |||
JP2020197082A | 2020-12-10 | |||
JP2013053490A | 2013-03-21 | |||
JPH08184046A | 1996-07-16 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
Download PDF:
Previous Patent: GAS-BARRIER FILM AND PACKAGING MATERIAL
Next Patent: INSPECTION METHOD AND INSPECTING DEVICE
Next Patent: INSPECTION METHOD AND INSPECTING DEVICE