Title:
SHAPE MEASUREMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/022671
Kind Code:
A1
Abstract:
The present invention relates to a shape measurement apparatus comprising: a driving body (130); a measurement arm part (110) having a stylus (111) coming into contact with an object to be measured, and an arm (113) for supporting the stylus (111) so that the stylus (111) comes into contact with the object to be measured; a measurement arm support part (120) coupled to an end of the arm (113); a pivot (121) for rotatably supporting the measurement arm support part (120) with respect to the driving body (130); and an actuator part (140) for controlling the measurement arm support part (120) to rotate up and down with respect to the pivot (121) so that the stylus (111) moves along the object to be measured. The actuator part (140) comprises: a casing (141) partitioned into an upper space and a lower space by a partition wall (141a); an arm coupling base (142) for connecting the casing (141) and the measuring arm support part (120); an upper actuator (143) provided in the upper space; and a lower actuator (145) provided in the lower space, wherein the upper actuator (143) and the lower actuator (145) each comprise: magnetic coupling plates (143a, 145a); first magnets (143b, 145a) provided in an upper portion of the magnet coupling plates (143a, 145a); second magnets (143c, 145c) provided in a lower portion of the magnetic coupling plates (143a, 145a); and coils (143d, 145d) coupled to the arm coupling base (142) and surrounding the magnetic coupling plates (143a, 145a).
Inventors:
HWANG JAE EUN (KR)
Application Number:
PCT/KR2019/008492
Publication Date:
January 30, 2020
Filing Date:
July 10, 2019
Export Citation:
Assignee:
HWANG JAE EUN (KR)
International Classes:
G01B5/20
Foreign References:
| KR101626322B1 | 2016-06-01 | |||
| JPH1155926A | 1999-02-26 | |||
| KR101217217B1 | 2012-12-31 | |||
| JPH05340706A | 1993-12-21 | |||
| JP2011089830A | 2011-05-06 |
Attorney, Agent or Firm:
TAEDONG INTERNATIONAL PATENT LAW&FIRM (KR)
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