SHAPE MEASUREMENT DEVICE AND SHAPE MEASUREMENT METHOD

WIPO Patent Application WO/2023/243220

A1

The present invention makes it possible to measure the shape of an object with high accuracy while preventing generation of measurement noise.　A probe comprises an optical path switching element that switches optical paths of measurement light emitted from an optical element. The optical path switching element has a first surface through which the measurement light enters, a second surface that reflects the measurement light that has entered through the first surface, a third surface that emits the measurement light reflected from the second surface onto an object, a fourth surface in contact with the second surface, and a fifth surface that emits the measurement light that has passed through the second surface onto the object. The angle between the normal to the second surface and the rotation axis of the probe is greater than 45 degrees. The angle between the normal to the third surface and the rotation axis is less than 90 degrees. The normal to the fifth surface is not parallel to the rotation axis.

WO/2003/050472	SYSTEMS AND METHODS FOR WAVEFRONT MEASUREMENT
JP2525243	[Name of device] Interferometer
WO/2001/059431	METHOD AND DEVICE FOR PRODUCING HEIGHT IMAGES OF TECHNICAL SURFACES WITH MICROSCOPIC RESOLUTION

MARUNO KENJI (JP)
WATANABE MASAHIRO (JP)
HARIYAMA TATSUO (JP)
AKIYAMA HIROHITO (JP)
KANDO HIDEHIKO (JP)

PCT/JP2023/015716

December 21, 2023

April 20, 2023

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HITACHI HIGH TECH CORP (JP)

G01B11/24

JP6513846B2	2019-05-15
JPH07151521A	1995-06-16
JP2001221954A	2001-08-17

SHOYO INTELLECTUAL PROPERTY FIRM (JP)

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