Title:
SHAPE MEASUREMENT DEVICE, STRUCTURE PRODUCTION SYSTEM, SHAPE MEASUREMENT METHOD, STRUCTURE PRODUCTION METHOD, AND SHAPE MEASUREMENT PROGRAM
Document Type and Number:
WIPO Patent Application WO/2014/156723
Kind Code:
A1
Abstract:
The present invention reduces the time and effort required to set a point cloud data extraction area. A shape measurement device is provided with a projection unit for projecting measurement light onto a measurement area of an object to be measured, an imaging unit for imaging the object to be measured having measurement light projected thereon, a moving mechanism for moving the projection unit or imaging unit in relation to the object to be measured so that the position of the measurement area of the object to be measured changes, and an extraction area setting unit for setting, on the basis of the positions of the measurement light images captured by the imaging unit when the measurement light was projected onto the different measurement areas, an image information extraction area to use to calculate the position of the object to be measured from the images captured by the imaging unit.
Inventors:
KANTO KENTA (JP)
Application Number:
PCT/JP2014/056889
Publication Date:
October 02, 2014
Filing Date:
March 14, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01B11/24; G01B11/00
Domestic Patent References:
| WO2001001072A1 | 2001-01-04 |
Foreign References:
| JP2009198342A | 2009-09-03 | |||
| JP2012220473A | 2012-11-12 | |||
| JP2010133722A | 2010-06-17 | |||
| US20110058023A1 | 2011-03-10 | |||
| JP2009534969A | 2009-09-24 | |||
| JP2009068998A | 2009-04-02 |
Other References:
See also references of EP 2985565A4
Attorney, Agent or Firm:
KAWAKITA, Kijuro et al. (JP)
Kijuro Kawakita (JP)
Kijuro Kawakita (JP)
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