Title:
SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/149912
Kind Code:
A1
Abstract:
A shape measurement method to which the present invention is applied is provided with: a step for irradiating an object to be measured with a light pulse stream in which a plurality of light pulses having a prescribed frequency distribution with respect to a time axis are disposed in a consecutive sequence in time series; and a step for measuring the optical shape of the object to be measured using the correspondence relationship between the sequence numbers of the light pulses of a plurality of light pulse streams to be received after the emitted light pulses are applied to the object to be measured, and using the correspondence relationship between the frequency distributions in the light pulses.
Inventors:
MINOSHIMA KAORU (JP)
Application Number:
PCT/JP2016/088196
Publication Date:
September 08, 2017
Filing Date:
December 21, 2016
Export Citation:
Assignee:
THE UNIV OF ELECTRO-COMMUNICATIONS (JP)
International Classes:
G01B11/24; G01B9/02; G01S17/10; G01S17/89
Foreign References:
| JP2011013104A | 2011-01-20 | |||
| JP2003126044A | 2003-05-07 |
Other References:
See also references of EP 3425326A4
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
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