Title:
SHAPE MEASUREMENT SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/059236
Kind Code:
A1
Abstract:
This shape measurement sensor is provided with: a light receiving unit on which light reflected on a measurement line is incident; and a calculation unit which calculates positon information about positions on the measurement line on the basis of the incident position of the light. The light receiving unit includes multiple pixel pairs which are arranged in a first direction and which each include a first pixel that generates a first electric signal according to the light amount of light incident thereon, and a second pixel that generates a second electric signal according to the light amount of light incident thereon and that is disposed side by side, in a first direction intersecting with the irradiation direction, with the first pixel. In the first pixel, when the incident position is closer to one end, of the light receiving unit, in a second direction intersecting with the first direction, the intensity of the first electric signal is lowered. In the second pixel, when the incident position is closer to the one end in the second direction, the intensity of the second electric signal is increased. The calculation unit acquires the first electric signal and the second electric signal of each pixel pair, and calculates the incident position in the second direction for each pixel pair on the basis of the intensity of the acquired first electric signal and the intensity of the acquired second electric signal.
Inventors:
TAKUMI MUNENORI (JP)
TOYODA HARUYOSHI (JP)
MATSUI YOSHINORI (JP)
SUZUKI KAZUTAKA (JP)
NAKAMURA KAZUHIRO (JP)
UCHIDA KEISUKE (JP)
TOYODA HARUYOSHI (JP)
MATSUI YOSHINORI (JP)
SUZUKI KAZUTAKA (JP)
NAKAMURA KAZUHIRO (JP)
UCHIDA KEISUKE (JP)
Application Number:
PCT/JP2018/034669
Publication Date:
March 28, 2019
Filing Date:
September 19, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01J1/02; G01B11/24; H01L31/12
Foreign References:
| JPS63212832A | 1988-09-05 | |||
| JPS63229306A | 1988-09-26 | |||
| JPS61140827A | 1986-06-27 | |||
| US5547879A | 1996-08-20 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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