Title:
SHAPE MEASURING DEVICE AND SHAPE MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/209026
Kind Code:
A1
Abstract:
A shape measuring device 1 comprising: a holder 45 that holds an object W to be measured; a sensor 30 that measures the shape of a plane W1 to be measured, in a pressurized state, and outputs a measurement value; a drive device that rotates the sensor 30 around a center axis R1; a slide rail 20 and bar 21 capable of moving the sensor 30 along an axis R2 orthogonal to the center axis R1 and capable of moving same along both sides of an intersection between the axis R2 and the center axis R1; an XYZ stage capable of moving the holder 45 along the Z axis and capable of moving same within the XY plane; and a control device 60 that calculates the position of the spherical center of the plane W1 to be measured, on the basis of the measurement value output from the sensor 30, and performs control such that the position of the spherical center matches the rotation center C of the sensor 30.
Inventors:
TAKAHASHI YUKI (JP)
Application Number:
PCT/JP2017/019846
Publication Date:
December 07, 2017
Filing Date:
May 29, 2017
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
G01B5/20; G01B5/00
Foreign References:
| JP2002228403A | 2002-08-14 | |||
| JP2012132748A | 2012-07-12 | |||
| JP2011203121A | 2011-10-13 | |||
| JP2007107931A | 2007-04-26 | |||
| JPH07143998A | 1995-06-06 | |||
| US4903413A | 1990-02-27 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Download PDF: