Title:
SHAPE MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/084194
Kind Code:
A1
Abstract:
A shape measuring device is provided which can measure the three-dimensional shape of a surface with high speed and high accuracy. A low-coherence beam emitted from a low-coherence light source (12) enters a beam splitter (18) via a collimator (16) and is divided into a measurement beam and a reference beam by the beam splitter (18). The measurement beam is magnified and collimated by a telecentric optic system (20) and is irradiated onto the measurement object (O). By means of the bream splitter (18), the measurement beam reflected on the measurement object (O) and the reference beam reflected on a CCP (40) are combined into one, interfere, and enter an optical detector (24). The optical detector (24) is configured from a matrix arrangement of light receiving elements (30). The three-dimensional shape of the area irradiated by the measurement beam is measured on the basis of the light intensity of the interference beam detected by the light receiving elements (30) of the optical detector (24).
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Inventors:
AOTO TOMOHIRO (JP)
Application Number:
PCT/JP2014/081400
Publication Date:
June 02, 2016
Filing Date:
November 27, 2014
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
G01B11/24; G01B9/02
Foreign References:
| JP2014098572A | 2014-05-29 | |||
| JP2012042260A | 2012-03-01 | |||
| JP2008224568A | 2008-09-25 | |||
| JP2005530147A | 2005-10-06 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
Kenzo Matsuura (JP)
Kenzo Matsuura (JP)
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