Title:
SHARPENED DIAMOND NEEDLE, CANTILEVER USING THE SAME FOR SCANNING-PROBE MICROSCOPE, PHOTOMASK-CORRECTING PROBE, AND ELECTRON BEAM SOURCE
Document Type and Number:
WIPO Patent Application WO/2010/016257
Kind Code:
A1
Abstract:
Provided are a diamond probe, a cantilever comprising the same for a scanning-probe microscope, a photomask-correcting probe, and an electron beam source. The diamond probe can be efficiently produced in large quantities. The diamond probe has a tip diameter that allows a scanning-probe microscope to perform observation with high resolution and microfabrication with high precision. The diamond probe comprises a needle having sufficient length for performing structured observation with a high aspect ratio. The tip of the diamond probe is wear resistant. The diamond needle having a length, which is difficult to be fabricated by, for example, reactive-ion etching, is fabricated by thermochemical treatment, and the tip portion of the diamond needle is sharpened by plasma etching or by growing the tip portion with microwave plasma CVD. Thus, the sharpened diamond needle that can be efficiently produced in large quantities can be obtained. The cantilever for the scanning-probe microscope comprises at least one or a plurality of sharpened diamond needles as the probe.
Inventors:
KOYAMA, Kouji (NAMIKI SEMITSU HOUSEKI KABUSHIKIKAISHA, 8-22Shinden 3-chome, Adachi-k, Tokyo 11, 〒1238511, JP)
小山浩司 (〒11 東京都足立区新田３丁目８番２２号並木精密宝石株式会社内 Tokyo, 〒1238511, JP)
SAWABE, Atsuhito (AGD Material Corporation, 4-4-25Shibuya, Shibuya-k, Tokyo 02, 〒1500002, JP)
小山浩司 (〒11 東京都足立区新田３丁目８番２２号並木精密宝石株式会社内 Tokyo, 〒1238511, JP)
SAWABE, Atsuhito (AGD Material Corporation, 4-4-25Shibuya, Shibuya-k, Tokyo 02, 〒1500002, JP)
Application Number:
JP2009/003765
Publication Date:
February 11, 2010
Filing Date:
August 06, 2009
Export Citation:
Assignee:
NAMIKI SEIMITSU HOUSEKI KABUSHIKIKAISHA (8-22, Shinden 3-chome Adachi-k, Tokyo 11, 〒1238511, JP)
並木精密宝石株式会社 (〒11 東京都足立区新田３丁目８番２２号 Tokyo, 〒1238511, JP)
AGD MATERIAL CORPORATION (AOYAMA GAKUIN UNIVERSITY, 4-4-25Shibuya, Shibuya-k, Tokyo 02, 〒1500002, JP)
ＡＧＤマテリアル株式会社 (〒02 東京都渋谷区渋谷４丁目４番２５号青山学院大学内 Tokyo, 〒1500002, JP)
KOYAMA, Kouji (NAMIKI SEMITSU HOUSEKI KABUSHIKIKAISHA, 8-22Shinden 3-chome, Adachi-k, Tokyo 11, 〒1238511, JP)
並木精密宝石株式会社 (〒11 東京都足立区新田３丁目８番２２号 Tokyo, 〒1238511, JP)
AGD MATERIAL CORPORATION (AOYAMA GAKUIN UNIVERSITY, 4-4-25Shibuya, Shibuya-k, Tokyo 02, 〒1500002, JP)
ＡＧＤマテリアル株式会社 (〒02 東京都渋谷区渋谷４丁目４番２５号青山学院大学内 Tokyo, 〒1500002, JP)
KOYAMA, Kouji (NAMIKI SEMITSU HOUSEKI KABUSHIKIKAISHA, 8-22Shinden 3-chome, Adachi-k, Tokyo 11, 〒1238511, JP)
International Classes:
C30B33/12; C01B31/06; C30B29/04; C30B29/62; H01J1/304; H01J9/02
Attorney, Agent or Firm:
NAMIKI SEIMITSU HOUSEKI KABUSHIKIKAISHA (8-22, Shinden 3-chome Adachi-k, Tokyo 11, 〒1238511, JP)
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