Title:
SHEET-FORM PROBE AND PROBE CARD AND WAFER INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2006/051880
Kind Code:
A1
Abstract:
A sheet-form probe comprising an insulation layer and a contact film provided with a plurality of electrode structures disposed in the surface direction of the insulation layer so as to be separated from each other and extending through the insulation layer in the thickness direction thereof, wherein each of the electrode structures consists of a front surface electrode unit exposed to the surface of the insulation layer and then projecting beyond the surface of the insulation layer, a rear surface electrode unit exposed to the rear surface of the insulation layer, and a short-circuit unit extending from the base end of the front surface electrode unit continuously through the insulation layer in the thickness direction thereof and joined to the rear surface electrode unit, with a shoulder unit provided so that the upper end portion of the short-circuit unit is different in diameter from the base end of the front surface electrode unit, the contact film is supported on the peripheral edge of a through hole in a metal frame sheet formed with the through holes, and a ring-form support member is provided on the outer peripheral edge of the metal frame sheet away from the insulation layer, the following conditions (1)-(3) being satisfied when thermal expansion coefficient of the insulation layer is H1, thermal expansion coefficient of the metal frame sheet H2, thermal expansion coefficient of the ring-form support member H3. Condition (1): H1=0.8×10-5 through 8×10-5/K Condition (2): H2/H1<1 Condition (3): H3/H1<1
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Inventors:
YOSHIOKA MUTSUHIKO (JP)
FUJIYAMA HITOSHI (JP)
IGARASHI HISAO (JP)
FUJIYAMA HITOSHI (JP)
IGARASHI HISAO (JP)
Application Number:
PCT/JP2005/020648
Publication Date:
May 18, 2006
Filing Date:
November 10, 2005
Export Citation:
Assignee:
JSR CORP (JP)
YOSHIOKA MUTSUHIKO (JP)
FUJIYAMA HITOSHI (JP)
IGARASHI HISAO (JP)
YOSHIOKA MUTSUHIKO (JP)
FUJIYAMA HITOSHI (JP)
IGARASHI HISAO (JP)
International Classes:
G01R1/073; H01L21/66
Foreign References:
| JP2002076074A | 2002-03-15 | |||
| JPH07283280A | 1995-10-27 | |||
| JP2004172589A | 2004-06-17 | |||
| JPH05152019A | 1993-06-18 | |||
| JP2000306961A | 2000-11-02 | |||
| JP2005128028A | 2005-05-19 |
Attorney, Agent or Firm:
Suzuki, Shunichiro (13-6 Nishigotanda 7-chome, Shinagawa-ku Tokyo 31, JP)
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