SHEET-LIKE PROBE, METHOD OF PRODUCING THE PROBE, AND APPLICATION OF THE PROBE

WIPO Patent Application WO/2005/103733

A1

A sheet-like probe in which electrode structure bodies are each composed of a front surface electrode section exposed to the front surface of an insulation layer, projecting from the front surface of the insulation layer, and having a shape whose diameter is reduced from a base end of the front surface electrode section toward its head, a back surface electrode section exposed to the back surface of the insulation layer, and a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section. The diameter of the base end of the surface electrode is greater than the diameter of that end of the short-circuit section which is in contact with the front surface electrode section.

SATO KATSUMI (JP)
INOUE KAZUO (JP)
FUJIYAMA HITOSHI (JP)
YOSHIOKA MUTSUHIKO (JP)
IGARASHI HISAO (JP)

PCT/JP2005/007938

November 03, 2005

April 26, 2005

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JSR CORP (JP)
SATO KATSUMI (JP)
INOUE KAZUO (JP)
FUJIYAMA HITOSHI (JP)
YOSHIOKA MUTSUHIKO (JP)
IGARASHI HISAO (JP)

A63H17/045; A63H29/22; A63H30/00; A63H31/08; A63H30/04; A63H31/00; B60K17/16; F16H1/14; F16H1/20; F16H1/28; F16H48/08; G01R1/06; G01R1/073; G01R31/26; H01L21/06; H01L21/66; H01L51/50; H05B33/14; G01R1/067; G01R3/00; (IPC1-7): G01R1/06; G01R31/26; H01L21/06

JPH11191579A	1999-07-13
JP2002116224A	2002-04-19
JP2002324600A	2002-11-08
JP2001093945A	2001-04-06

Suzuki, Shunichiro (Gotanda Yamazaki Bldg. 6F 13-6, Nishigotanda 7-chom, Shinagawa-ku Tokyo 31, JP)

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