Title:
SHEET PROVIDED WITH CURABLE RESIN FILM-FORMING LAYER AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SHEET
Document Type and Number:
WIPO Patent Application WO/2014/084357
Kind Code:
A1
Abstract:
[Problem] To improve the adhesion between a resin film-forming layer, which serves as a precursor of an adhesive film or protective film, or a cured resin film obtained therefrom and a semiconductor chip or semiconductor wafer that is an adherend.
[Solution] A sheet according to the present invention that is provided with a curable resin film-forming layer, which comprises a supporting sheet and the curable resin film-forming layer that is formed in a peelable manner on the supporting sheet, is characterized in that: the curable resin film-forming layer comprises a curable binder component and a silane coupling agent (C); and, on at least one surface of a resin film that is obtained by curing the curable resin film-forming layer, the concentration (X) of surface silicon element derived from the silane coupling agent (C) is 3.4 times or higher of the average concentration (Y) of inner silicon element derived from the silane coupling agent (C), said average concentration (Y) being determined by measuring the concentration of inner silicon derived from the silane coupling agent (C) at least at one point in each of the depth ranges of 40-60 nm, 60-80 nm and 80-100 nm in the depth direction from the aforesaid surface, i.e., at least at three points in total.
Inventors:
KOZONE YUICHI (JP)
FURUDATE MASAAKI (JP)
ICHIKAWA ISAO (JP)
FURUDATE MASAAKI (JP)
ICHIKAWA ISAO (JP)
Application Number:
PCT/JP2013/082187
Publication Date:
June 05, 2014
Filing Date:
November 29, 2013
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
B32B27/18; B32B5/14; B32B7/06; C09J7/20; C09J11/06; C09J201/00; H01L21/52; H01L23/29; H01L23/31
Domestic Patent References:
| WO2011046238A1 | 2011-04-21 | |||
| WO2003018703A1 | 2003-03-06 |
Foreign References:
| JP2011162603A | 2011-08-25 | |||
| JP2009215456A | 2009-09-24 | |||
| JP2009138026A | 2009-06-25 | |||
| JPH04145119A | 1992-05-19 | |||
| JP2000017246A | 2000-01-18 |
Attorney, Agent or Firm:
MAEDA & SUZUKI (JP)
Maeda and a Suzuki international patent business corporation (JP)
Maeda and a Suzuki international patent business corporation (JP)
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