Title:
SHEET-SHAPED PROBE, MANUFACTURING METHOD THEREOF AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2005/103732
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a sheet-shaped probe and a manufacturing method thereof, by which stable connecting conditions are attained even in a microcircuit device of a fine pitch, an electrode structure does not drop from an insulating layer and high durability is obtained, a positional shift between the electrode structure and an electrode to be tested due to a temperature change is surely prevented in a burn-in test of a large-area wafer and the circuit device with a small-pitch electrode to be tested, and the excellent connecting conditions are stably maintained. [MEANS FOR SOLVING PROBLEMS] A sheet-shaped probe is provided with an insulating layer having a plurality of electrode structures extending in a thickness direction, and a supporting body for supporting the insulating layer. The electrode structure is composed of a front plane electrode part protruding from the front plane of the insulating layer, a rear plane electrode part exposed from the rear plane of the insulating layer, a short-circuiting part, which continuously extends from the base edge of the front plane electrode part in the thickness direction of the insulating layer and is connected to the rear plane electrode part, and a supporting part which continuously extends from the base edge part of the front plane electrode part along the front plane of the insulating layer to the external. In a manufacturing method, the front plane electrode part and the short-circuiting part are separately filled with a metal.
Inventors:
SATO KATSUMI (JP)
INOUE KAZUO (JP)
FUJIYAMA HITOSHI (JP)
YOSHIOKA MUTSUHIKO (JP)
IGARASHI HISAO (JP)
INOUE KAZUO (JP)
FUJIYAMA HITOSHI (JP)
YOSHIOKA MUTSUHIKO (JP)
IGARASHI HISAO (JP)
Application Number:
PCT/JP2005/007937
Publication Date:
November 03, 2005
Filing Date:
April 26, 2005
Export Citation:
Assignee:
JSR CORP (JP)
SATO KATSUMI (JP)
INOUE KAZUO (JP)
FUJIYAMA HITOSHI (JP)
YOSHIOKA MUTSUHIKO (JP)
IGARASHI HISAO (JP)
SATO KATSUMI (JP)
INOUE KAZUO (JP)
FUJIYAMA HITOSHI (JP)
YOSHIOKA MUTSUHIKO (JP)
IGARASHI HISAO (JP)
International Classes:
A63H17/045; A63H29/22; A63H30/00; A63H31/08; A63H30/04; A63H31/00; B60K17/16; F16H1/14; F16H1/20; F16H1/28; F16H48/08; G01R1/06; G01R1/073; G01R31/26; H01L21/06; H01L21/66; H01L51/50; H05B33/14; G01R1/067; G01R3/00; (IPC1-7): G01R1/06; G01R31/26; H01L21/66
Foreign References:
| JP2002076074A | 2002-03-15 | |||
| JP2002184821A | 2002-06-28 | |||
| JP2001208776A | 2001-08-03 | |||
| JP2002289277A | 2002-10-04 | |||
| JP2004172589A | 2004-06-17 | |||
| JP2004361395A | 2004-12-24 |
Attorney, Agent or Firm:
Suzuki, Shunichiro (Gotanda Yamazaki Bldg. 6F 13-6, Nishigotanda 7-chom, Shinagawa-ku Tokyo 31, JP)
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