Title:
SHEET SUPPORT CONTAINER
Document Type and Number:
WIPO Patent Application WO/1999/039994
Kind Code:
A1
Abstract:
A sheet support container (1) comprises a container body (2), and a sheet support (3) for supporting a semiconductor wafer on both sides in the container body (2). The container comprises a cover body (4) and a simple detaching mechanism (31), for easily mounting/removing the cover body (4), comprising a cover body latch pawl (32) provided on a peripheral edge of the cover body (4), a fitted portion (28) which is provided on a side of the container body (2) and on which the cover body latch pawl (32) fits to secure the cover body (4) to the container body (2), an arm (34) for detaching the cover body latch pawl (32) from the fitted portion (28), and a lifting mechanism for lifting the cover body (4) slightly from the container body (2) when the arm (34) detaches the cover body latch pawl (32). The sheet support (3), top flange (5) and a portable handle (6) are provided to be detachable. The sheet support (3) is provided with a V-shaped groove (38). For ease of stacking, a leg (18) and a leg receiving portion (30) are provided. Accordingly, mounting and dismounting operations of the cover body (4) as well as a general cleaning operation are easy.
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Inventors:
Oka, Yasunori (Sumitomo Metal Industries Ltd, Sitix Division, 2201, Oaza Kamioda, Kohoku-ch, Kishima-gun Saga-ken, 849-0597, JP)
Hyobu, Yukihiro (Kakizaki Manufacturing Co. Ltd, 18-2, Nishi-Ikebukuro 1-chom, Toshima-ku Tokyo, 171-0021, JP)
Hyobu, Yukihiro (Kakizaki Manufacturing Co. Ltd, 18-2, Nishi-Ikebukuro 1-chom, Toshima-ku Tokyo, 171-0021, JP)
Application Number:
PCT/JP1998/000489
Publication Date:
August 12, 1999
Filing Date:
February 06, 1998
Export Citation:
Assignee:
SUMITOMO METAL INDUSTRIES, LTD. (5-33, Kitahama 4-chome Cyuo-k, Osaka-shi Osaka, 541-0041, JP)
KAKIZAKI MANUFACTURING CO., LTD. (18-2, Nishi-Ikebukuro 1-chome Toshima-ku, Tokyo, 171-0021, JP)
Oka, Yasunori (Sumitomo Metal Industries Ltd, Sitix Division, 2201, Oaza Kamioda, Kohoku-ch, Kishima-gun Saga-ken, 849-0597, JP)
Hyobu, Yukihiro (Kakizaki Manufacturing Co. Ltd, 18-2, Nishi-Ikebukuro 1-chom, Toshima-ku Tokyo, 171-0021, JP)
KAKIZAKI MANUFACTURING CO., LTD. (18-2, Nishi-Ikebukuro 1-chome Toshima-ku, Tokyo, 171-0021, JP)
Oka, Yasunori (Sumitomo Metal Industries Ltd, Sitix Division, 2201, Oaza Kamioda, Kohoku-ch, Kishima-gun Saga-ken, 849-0597, JP)
Hyobu, Yukihiro (Kakizaki Manufacturing Co. Ltd, 18-2, Nishi-Ikebukuro 1-chom, Toshima-ku Tokyo, 171-0021, JP)
International Classes:
H01L21/673; (IPC1-7): B65D85/38; B65D43/04; B65D21/02; H01L21/68
Attorney, Agent or Firm:
Kudoh, Nobuyuki (2F Ikebukuro Mutumi Building, 41-8 Minami-Ikebukuro 2-chom, Toshima-ku Tokyo, 171-0022, JP)
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