Title:
SHELL TYPE ACTUATOR
Document Type and Number:
WIPO Patent Application WO2005020434
Kind Code:
A3
Abstract:
A micromechanical resonator (400, 1125) is formed on a substrate (120). The resonator has a partial spherical shell (110) clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectable out-of-plane motion. A laser (1110) is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques.
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Inventors:
ZALALUTDINOV MAXIM (US)
REICHENBACH ROBERT B (US)
AUBIN KEITH (US)
HOUSTON BRIAN H (US)
PARPIA JEEVAK M (US)
CRAIGHEAD HAROLD G (US)
REICHENBACH ROBERT B (US)
AUBIN KEITH (US)
HOUSTON BRIAN H (US)
PARPIA JEEVAK M (US)
CRAIGHEAD HAROLD G (US)
Application Number:
PCT/US2004/027162
Publication Date:
May 06, 2005
Filing Date:
August 20, 2004
Export Citation:
Assignee:
CORNELL RES FOUNDATION INC (US)
NAVAL RES LAB (US)
ZALALUTDINOV MAXIM (US)
REICHENBACH ROBERT B (US)
AUBIN KEITH (US)
HOUSTON BRIAN H (US)
PARPIA JEEVAK M (US)
CRAIGHEAD HAROLD G (US)
NAVAL RES LAB (US)
ZALALUTDINOV MAXIM (US)
REICHENBACH ROBERT B (US)
AUBIN KEITH (US)
HOUSTON BRIAN H (US)
PARPIA JEEVAK M (US)
CRAIGHEAD HAROLD G (US)
International Classes:
B81B3/00; H03C1/46; H03D1/00; H03D3/34; H03H3/007; H03H9/24; H03H11/10; (IPC1-7): H03H9/00
Foreign References:
| EP0451992A2 | 1991-10-16 | |||
| US20020126387A1 | 2002-09-12 | |||
| US6271052B1 | 2001-08-07 | |||
| US20020086455A1 | 2002-07-04 |
Other References:
ZALALUTDINOV M ET AL: "SHELL-TYPE MICROMECHANICAL OSCILLATOR", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 5116, 19 May 2003 (2003-05-19), pages 229 - 236, XP009016074, ISSN: 0277-786X
R. KAZINCZI ET AL.: "3-D Resonator bridges as sensing elements", 1 December 2000, SESENS WORKSHOP ON SEMICONDUCTOR SENSORS, VELDHOVEN, NL, ISBN: 90-73461-24-3, XP002316539
BIRCUMSHAW B ET AL: "The radial bulk annular resonator: towards a 50[Omega] RF MEMS filter", TRANSDUCERS '03. 12TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS. DIGEST OF TECHNICAL PAPERS (CAT. NO.03TH8664) IEEE PISCATAWAY, NJ, USA, vol. 1, 8 June 2003 (2003-06-08) - 12 June 2003 (2003-06-12), BOSTON, pages 875 - 878 vol.1, XP002316537, ISBN: 0-7803-7731-1
ABDELMONEUM M A ET AL: "Stemless wine-glass-mode disk micromechanical resonators", PROCEEDINGS OF THE IEEE 16TH. ANNUAL INTERNATIONAL CONFERENCE ON MICROELECTRO MECHANICAL SYSTEMS. MEMS 2003. KYOTO, JAPAN, AN. 19 - 23, 2003, IEEE INTERNATIONAL MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE, NEW YORK, NY : IEEE, US, vol. CONF. 16, 19 January 2003 (2003-01-19), pages 698 - 701, XP010637068, ISBN: 0-7803-7744-3
CLARK J R ET AL: "High-Q VHF micromechanical contour-mode disk resonators", IEDM, 10 December 2000 (2000-12-10), pages 493 - 496, XP010531812
ZALALUTDINOV MAXIM ET AL: "Shell-type micromechanical actuator and resonator", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 83, no. 18, 3 November 2003 (2003-11-03), pages 3815 - 3817, XP012060504, ISSN: 0003-6951
REICHENBACH R B ET AL: "Resistively actuated micromechanical dome resonators", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE-INT. SOC. OPT. ENG USA, vol. 5344, no. 1, 27 January 2004 (2004-01-27), pages 51 - 58, XP002316538, ISSN: 0277-786X
See also references of EP 1661245A2
R. KAZINCZI ET AL.: "3-D Resonator bridges as sensing elements", 1 December 2000, SESENS WORKSHOP ON SEMICONDUCTOR SENSORS, VELDHOVEN, NL, ISBN: 90-73461-24-3, XP002316539
BIRCUMSHAW B ET AL: "The radial bulk annular resonator: towards a 50[Omega] RF MEMS filter", TRANSDUCERS '03. 12TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS. DIGEST OF TECHNICAL PAPERS (CAT. NO.03TH8664) IEEE PISCATAWAY, NJ, USA, vol. 1, 8 June 2003 (2003-06-08) - 12 June 2003 (2003-06-12), BOSTON, pages 875 - 878 vol.1, XP002316537, ISBN: 0-7803-7731-1
ABDELMONEUM M A ET AL: "Stemless wine-glass-mode disk micromechanical resonators", PROCEEDINGS OF THE IEEE 16TH. ANNUAL INTERNATIONAL CONFERENCE ON MICROELECTRO MECHANICAL SYSTEMS. MEMS 2003. KYOTO, JAPAN, AN. 19 - 23, 2003, IEEE INTERNATIONAL MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE, NEW YORK, NY : IEEE, US, vol. CONF. 16, 19 January 2003 (2003-01-19), pages 698 - 701, XP010637068, ISBN: 0-7803-7744-3
CLARK J R ET AL: "High-Q VHF micromechanical contour-mode disk resonators", IEDM, 10 December 2000 (2000-12-10), pages 493 - 496, XP010531812
ZALALUTDINOV MAXIM ET AL: "Shell-type micromechanical actuator and resonator", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 83, no. 18, 3 November 2003 (2003-11-03), pages 3815 - 3817, XP012060504, ISSN: 0003-6951
REICHENBACH R B ET AL: "Resistively actuated micromechanical dome resonators", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE-INT. SOC. OPT. ENG USA, vol. 5344, no. 1, 27 January 2004 (2004-01-27), pages 51 - 58, XP002316538, ISSN: 0277-786X
See also references of EP 1661245A2
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