Title:
SHIELDING DEVICE AND SEMICONDUCTOR PROCESS APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/045190
Kind Code:
A1
Abstract:
The present invention provides a shielding device and a semiconductor process apparatus. The shielding device is configured to shield a base arranged in a process chamber of the semiconductor process apparatus. The base is configured to bear a wafer. The shielding device comprises a shutter disk and a tray for bearing the shutter disk, wherein the shutter disk comprises a shutter disk body and a protruding part arranged on the shutter disk body, and the protruding part is located on the side of the shutter disk body facing the tray; the tray is provided with a plurality of correction mechanisms, the plurality of correction mechanisms are distributed along the circumferential direction of the tray, and the plurality of correction mechanisms are configured to push the protruding part to move to a target position on the upper surface of the tray under the action of the gravity of the shutter disk when the shutter disk falls to the tray. The present invention can improve the accuracy of alignment between the shutter disk and the tray.
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Inventors:
ZHAO KANGNING (CN)
Application Number:
PCT/CN2022/071373
Publication Date:
March 30, 2023
Filing Date:
January 11, 2022
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
C23C14/56; C23C14/34; C23C14/54; H01L21/68
Foreign References:
| CN113897588A | 2022-01-07 | |||
| CN102945788A | 2013-02-27 | |||
| JPH1074816A | 1998-03-17 | |||
| US20080099970A1 | 2008-05-01 | |||
| CN111725129A | 2020-09-29 | |||
| JP2010275574A | 2010-12-09 | |||
| CN103031514A | 2013-04-10 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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