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Patent Searching and Data


Title:
SHOWER PLATE
Document Type and Number:
WIPO Patent Application WO/2022/260042
Kind Code:
A1
Abstract:
This shower plate includes: a substrate; a resistance heating element; a flow path, and a hollow part. The substrate is ceramic and has a plate-like shape. The resistance heating element is located within the substrate, along a first surface of the substrate. The flow path is located in the interior of the substrate, between the resistance heating element and a second surface opposite the first surface of the substrate, and has an intermediate flow path that extends in the surface direction of the substrate. The hollow part is located in the interior of the substrate and adjacent to the intermediate flow path, in the surface direction of the substrate.

Inventors:
WATANABE DAIKI (JP)
HAMADA MIKI (JP)
ISHIMINE YUUSAKU (JP)
Application Number:
PCT/JP2022/022978
Publication Date:
December 15, 2022
Filing Date:
June 07, 2022
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/31; H05B3/18
Domestic Patent References:
WO2019235282A12019-12-12
Foreign References:
JP2019220639A2019-12-26
JPH11302850A1999-11-02
JPH10168572A1998-06-23
JP2004281648A2004-10-07
JP2010541239A2010-12-24
JP2007273747A2007-10-18
JPH0945624A1997-02-14
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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