Title:
Si-O CONTAINING HYDROGENATED CARBON FILM, OPTICAL DEVICE INCLUDING THE SAME, AND METHOD FOR MANUFACTURING THE Si-O CONTAINING HYDROGENATED FILM AND THE OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2008/056577
Kind Code:
A1
Abstract:
A Si-O containing hydrogenated film as an optical film is characterized in having
a refractive index within a range of 1.48 or more but not more than 1.85 to light
having a wavelength of 520nm and an extinction coefficient of less than 0.15 to
light having a wavelength of 248nm, and that the refractive index and the extinction
coefficient are reduced when receiving energy beam irradiation. Various types
of optical elements and optical devices including the optical elements are provided
by using such Si-O containing hydrogenated carbon film.
Inventors:
AKAHANE YOSHIHIRO (JP)
IMAI TAKAHIRO (JP)
MATSUURA TAKASHI (JP)
KATAYAMA TETSUYA (JP)
USHIRO TOSHIHIKO (JP)
IMAI TAKAHIRO (JP)
MATSUURA TAKASHI (JP)
KATAYAMA TETSUYA (JP)
USHIRO TOSHIHIKO (JP)
Application Number:
PCT/JP2007/071191
Publication Date:
May 15, 2008
Filing Date:
October 31, 2007
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES (JP)
AKAHANE YOSHIHIRO (JP)
IMAI TAKAHIRO (JP)
MATSUURA TAKASHI (JP)
KATAYAMA TETSUYA (JP)
USHIRO TOSHIHIKO (JP)
AKAHANE YOSHIHIRO (JP)
IMAI TAKAHIRO (JP)
MATSUURA TAKASHI (JP)
KATAYAMA TETSUYA (JP)
USHIRO TOSHIHIKO (JP)
International Classes:
C01B31/02; B32B9/00; G02B3/00; G02B5/18; G02B5/30; G02B5/32; G03H1/02
Domestic Patent References:
| WO2005047564A2 | 2005-05-26 | |||
| WO2005088364A1 | 2005-09-22 |
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Other References:
"Technique of Ultraprecision Machining and Mass Production of Microlens (Array)", 28 April 2003, TECHNICAL INFORMATION INSTITUTE CO., LTD., pages: 20 - 21
OPTRONICS, vol. 11, 2001, pages 149 - 154
0 PLUS E, vol. 25, no. 4, 2003, pages 385 - 390
OPTRONICS, 2001, pages 143 - 148
"Large Area Display", 2002, KYORITSU SHUPPAN CO., LTD.
APPLIED OPTICS, vol. 41, 2002, pages 3558 - 3566
ITE TECHNICAL REPORT, vol. 20, 1996, pages 69 - 72
S. NODA; A. CHUTINAN; M. IMADA, NATURE, vol. 407, 2000, pages 608
Y. AKAHANE ET AL., NATURE, vol. 425, 2003, pages 944
O. PAINTER ET AL., SCIENCE, vol. 284, 1999, pages 1819
S. NODA ET AL., SCIENCE, vol. 293, 2001, pages 1123
HIROYUKI ICHIKAWA; TOSHIHIKO BABA, SPRING MEETING OF THE JAPAN SOCIETY OF APPLIED PHYSICS, vol. 28, 2002, pages ZF-8
"Technique of Ultra precision Machining and Mass Production of Microlens (Array)", 28 April 2003, TECHNICAL INFORMATION INSTITUTE CO., LTD., pages: 20 - 21
OPTRONICS, 2001, pages 149 - 154
"Large-Screen Display", 2002, KYORITSU SHUPPAN CO., LTD.
OPTRONICS, vol. 11, 2001, pages 149 - 154
0 PLUS E, vol. 25, no. 4, 2003, pages 385 - 390
OPTRONICS, 2001, pages 143 - 148
"Large Area Display", 2002, KYORITSU SHUPPAN CO., LTD.
APPLIED OPTICS, vol. 41, 2002, pages 3558 - 3566
ITE TECHNICAL REPORT, vol. 20, 1996, pages 69 - 72
S. NODA; A. CHUTINAN; M. IMADA, NATURE, vol. 407, 2000, pages 608
Y. AKAHANE ET AL., NATURE, vol. 425, 2003, pages 944
O. PAINTER ET AL., SCIENCE, vol. 284, 1999, pages 1819
S. NODA ET AL., SCIENCE, vol. 293, 2001, pages 1123
HIROYUKI ICHIKAWA; TOSHIHIKO BABA, SPRING MEETING OF THE JAPAN SOCIETY OF APPLIED PHYSICS, vol. 28, 2002, pages ZF-8
"Technique of Ultra precision Machining and Mass Production of Microlens (Array)", 28 April 2003, TECHNICAL INFORMATION INSTITUTE CO., LTD., pages: 20 - 21
OPTRONICS, 2001, pages 149 - 154
"Large-Screen Display", 2002, KYORITSU SHUPPAN CO., LTD.
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (Nakanoshima Central Tower 22nd Floor, 2-7, Nakanoshima 2-chome, Kita-ku, Osaka-sh, Osaka 05, JP)
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