Title:
SIC HEATER
Document Type and Number:
WIPO Patent Application WO/2018/025911
Kind Code:
A1
Abstract:
This SiC heater is provided with: a heating element which comprises a silicon carbide sintered body in the form of a thin plate and an insulating coating film formed on the surface of the silicon carbide sintered body; a pair of electrodes for having an electric current pass through the heating element; and a heater base which holds the heating element from one surface side, while blocking the heat from the heating element. The insulating coating film is arranged on a surface of the silicon carbide sintered body, said surface being on the reverse side of the heater base-side surface, and has an electric specific resistance at room temperature of 109 Ω·cm or more and a thermal expansion coefficient of from 2 × 10-6/K to 6 × 10-6/K (inclusive). The insulating coating film uses SiO2 as a matrix, and contains 1% by weight to 35% by weight (inclusive) of a first additive component that contains at least one of B2O3 and Al2O3 and 1% by weight to 35% by weight (inclusive) of a second additive component that contains at least one of MgO and CaO.
Inventors:
NAGATOMO HIROAKI (JP)
UCHIKAWA YUKI (JP)
MURAKAMI YOSHIHIKO (JP)
UCHIKAWA YUKI (JP)
MURAKAMI YOSHIHIKO (JP)
Application Number:
PCT/JP2017/028028
Publication Date:
February 08, 2018
Filing Date:
August 02, 2017
Export Citation:
Assignee:
SUMITOMO OSAKA CEMENT CO LTD (JP)
International Classes:
H05B3/14; C03C3/06; C03C3/085; C03C3/087; C03C3/089; C03C3/091; C04B35/569; C04B41/86; H05B3/12; H05B3/20
Foreign References:
| JP2002025751A | 2002-01-25 | |||
| JPS60143585A | 1985-07-29 | |||
| JPH06104072A | 1994-04-15 | |||
| JPS6293884A | 1987-04-30 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
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