Title:
SIGNAL DETECTING METHOD FOR CAPACITANCE DETECTION TYPE SENSOR, MEMS SENSOR, AND SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/158469
Kind Code:
A1
Abstract:
In a capacitance detection type sensor system, it is not possible for low-frequency noise typified by 1/f noise to be frequency-separated from a signal band, and therefore the sensitivity of the sensor system deteriorates.
A carrier wave used for capacitance detection is modulated using two frequencies, is then sampled at a first modulation frequency and is C/V converted, and is then subjected to synchronous detection at a second modulation frequency to yield a signal.
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Inventors:
ONO KAZUO (JP)
MAEDA DAISUKE (JP)
OOSHIMA TAKASHI (JP)
MAEDA DAISUKE (JP)
OOSHIMA TAKASHI (JP)
Application Number:
PCT/JP2016/058580
Publication Date:
October 06, 2016
Filing Date:
March 17, 2016
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01P15/125; G01L9/12; G01P15/08
Foreign References:
| US20120285245A1 | 2012-11-15 | |||
| JP2011169672A | 2011-09-01 | |||
| JP2011095104A | 2011-05-12 | |||
| JP2010169522A | 2010-08-05 | |||
| JP2007327944A | 2007-12-20 | |||
| JP2006284272A | 2006-10-19 |
Other References:
See also references of EP 3279672A4
Attorney, Agent or Firm:
SEIRYO I. P. C. (JP)
青稜 patent business corporation (JP)
青稜 patent business corporation (JP)
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