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Patent Searching and Data


Title:
SIGNAL PROCESSING METHOD AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2018/105462
Kind Code:
A1
Abstract:
Provided is a signal processing method in which a computer executes the processes of: detecting a signal of light radiated onto a fluid object being inspected; searching for a waveform peak in the detected signal; fitting the width of the waveform of the searched peak; calculating a characteristic value of the fitted waveform; and determining, on the basis of whether the characteristic value of the calculated waveform falls within a pre-determined threshold range, whether the signal with the fitted waveform is a signal representing a fine particle in the object being inspected.

Inventors:
UMEHARA YASUTOSHI (JP)
Application Number:
PCT/JP2017/042854
Publication Date:
June 14, 2018
Filing Date:
November 29, 2017
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01N15/14
Domestic Patent References:
WO2013031309A12013-03-07
WO2011108369A12011-09-09
WO2015064628A12015-05-07
Foreign References:
JP2009097959A2009-05-07
JPH05240770A1993-09-17
JP2006153745A2006-06-15
JP2003279484A2003-10-02
JP2005537781A2005-12-15
JP2005502875A2005-01-27
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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