Title:
SIGNAL PROCESSING METHOD AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2018/105462
Kind Code:
A1
Abstract:
Provided is a signal processing method in which a computer executes the processes of: detecting a signal of light radiated onto a fluid object being inspected; searching for a waveform peak in the detected signal; fitting the width of the waveform of the searched peak; calculating a characteristic value of the fitted waveform; and determining, on the basis of whether the characteristic value of the calculated waveform falls within a pre-determined threshold range, whether the signal with the fitted waveform is a signal representing a fine particle in the object being inspected.
Inventors:
UMEHARA YASUTOSHI (JP)
Application Number:
PCT/JP2017/042854
Publication Date:
June 14, 2018
Filing Date:
November 29, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01N15/14
Domestic Patent References:
WO2013031309A1 | 2013-03-07 | |||
WO2011108369A1 | 2011-09-09 | |||
WO2015064628A1 | 2015-05-07 |
Foreign References:
JP2009097959A | 2009-05-07 | |||
JPH05240770A | 1993-09-17 | |||
JP2006153745A | 2006-06-15 | |||
JP2003279484A | 2003-10-02 | |||
JP2005537781A | 2005-12-15 | |||
JP2005502875A | 2005-01-27 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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