Title:
SIGNAL TRANSMISSION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/141566
Kind Code:
A1
Abstract:
A receiving circuit (22) and a sensor unit (21) of a pressure sensor (20) are formed on a pressure sensor IC chip (51). A transmission circuit (11) and a piezoelectric element (12) of an actuator (10) are formed on a transmission chip (52) and a piezoelectric chip (53), respectively. The pressure sensor IC chip (51) and the piezoelectric chip (53) are enclosed by a package main body (41) and a base substrate (42), and face one another in an air-sealed first space (44), separated by a distance (d1). The withstand voltage of signal transmission from a primary side to a secondary side is set with said distance (d1). The first space (44) is a pressure propagation region (30) configured from an insulating medium capable of transmitting vibrations in a piezoelectric element (12) as pressure (31). Because the insulating medium of the pressure propagation region (30) insulates between the primary side and the secondary side, highly insulated signal transmission from the primary side to the secondary side is performed between units integrated into a single module, by means of pressure (31) generated in the pressure propagation region (30).
Inventors:
AKAHANE MASASHI (JP)
Application Number:
PCT/JP2017/000332
Publication Date:
August 24, 2017
Filing Date:
January 06, 2017
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD (JP)
International Classes:
H04B11/00; B81B7/02; H01L23/04; H01L25/04; H01L25/18; H01L29/84
Domestic Patent References:
| WO2012141891A1 | 2012-10-18 |
Foreign References:
| JPS59149750U | 1984-10-06 | |||
| JPS52134481A | 1977-11-10 | |||
| JPH0415799U | 1992-02-07 | |||
| JPS6133129U | 1986-02-28 | |||
| US20110134725A1 | 2011-06-09 | |||
| US20120086305A1 | 2012-04-12 | |||
| JP2000183828A | 2000-06-30 | |||
| US5766975A | 1998-06-16 | |||
| JPS63126054A | 1988-05-30 |
Attorney, Agent or Firm:
SAKAI, Akinori (JP)
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