SILANOL COMPOUND REMOVER, SILANOL COMPOUND REMOVAL METHOD, CHEMICAL FILTER, AND LIGHT EXPOSURE DEVICE

Title:

SILANOL COMPOUND REMOVER, SILANOL COMPOUND REMOVAL METHOD, CHEMICAL FILTER, AND LIGHT EXPOSURE DEVICE

Document Type and Number:

WIPO Patent Application WO/2013/137300

Kind Code:

A1

Abstract:

A silanol compound remover characterized by being an activated carbon having an oxygen-containing functional group, and by having at least 0.5 mmol/g of the oxygen-containing functional group per 1 g of activated carbon. This invention provides a silanol compound remover having a high silanol compound removal effect.

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Inventors:

SHIMOTSU TAINEN (JP)
ISHIKAWA SYUN (JP)
IMAI AKIHIRO (JP)

Application Number:

PCT/JP2013/056970

Publication Date:

September 19, 2013

Filing Date:

March 13, 2013

Export Citation:

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Assignee:

NICHIAS CORP (JP)
SHIMOTSU TAINEN (JP)
ISHIKAWA SYUN (JP)
IMAI AKIHIRO (JP)

International Classes:

B01J20/20; B01D53/02; B01D53/72; B01D53/86; C01B31/08; H01L21/027

Domestic Patent References:

WO2011099616A1

2011-08-18

Foreign References:

JP2011212531A	2011-10-27
JPH02118121A	1990-05-02
JP2012030163A	2012-02-16
JP2011166085A	2011-08-25
JP2009295765A	2009-12-17
JP2012055807A	2012-03-22

Attorney, Agent or Firm:

AKATSUKA Kenji et al. (JP)
Kenji Akatsuka (JP)

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