Title:
SILICA DISPERSION AND ABRASIVE COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2022/085512
Kind Code:
A1
Abstract:
A problem addressed is to provide an antibacterial agent-compounded silica dispersion that has an antibacterial property, a slight decrease in polishing rate even when used as a component of an abrasive composition, and a good surface state of a polished substrate. The silica dispersion contains colloidal silica and an organic compound having a hemiformal structure. The organic compound having a hemiformal structure may be an aliphatic organic compound or an aromatic organic compound, and further, may be formed by combining an aliphatic organic compound and an aromatic organic compound.
Inventors:
HARAGUCHI TETSURO (JP)
Application Number:
PCT/JP2021/037689
Publication Date:
April 28, 2022
Filing Date:
October 12, 2021
Export Citation:
Assignee:
YAMAGUCHI SEIKEN KOGYO CO LTD (JP)
International Classes:
C09K3/14; A01N35/02; A01P3/00; B24B37/00; C01B33/14; H01L21/304
Foreign References:
| JP2005536426A | 2005-12-02 | |||
| JPH05255019A | 1993-10-05 | |||
| CN111321594A | 2020-06-23 | |||
| RU2209821C1 | 2003-08-10 |
Other References:
CHE, JIANFEI ET AL.: "Grafting polymerization of polyacetal onto nano-silica surface via bridging isocyanate", SURFACE AND COATINGS TECHNOLOGY, vol. 201, no. 8, 2007, pages 4578 - 4584, XP005802143, DOI: 10.1016/j.surfcoat.2006.09.124
Attorney, Agent or Firm:
WATANABE Kazuhira (JP)
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