Title:
SILICA GLASS CRUCIBLE
Document Type and Number:
WIPO Patent Application WO/2019/167345
Kind Code:
A1
Abstract:
The problem addressed by the present invention is to ensure sufficient strength of the inner and outer surfaces of the crucible. One embodiment of the present invention is a silica glass crucible comprising a cylindrical side wall, a curved bottom, and a corner portion having a curvature higher than that of the bottom and being provided between the side wall and the bottom, wherein the silica glass crucible is equipped with a first region provided halfway from the crucible inner surface in the thickness direction, a second region provided to the outside of the first region in the thickness direction and having a strain distribution different from the first region, and a third region provided from the outside of the second region to the outer surface of the crucible in the thickness direction and having a strain distribution different from the second region, the internal residual stress of the first region and the third region is compressive stress, and the internal residual stress of the second region is tensile stress.
Inventors:
KITAHARA KEN (JP)
SATO MASARU (JP)
YOSHIOKA TAKUMA (JP)
SATO MASARU (JP)
YOSHIOKA TAKUMA (JP)
Application Number:
PCT/JP2018/040896
Publication Date:
September 06, 2019
Filing Date:
November 02, 2018
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
C30B15/10; C03B20/00; C03C19/00; C30B29/06
Domestic Patent References:
| WO2017110762A1 | 2017-06-29 | |||
| WO2017110763A1 | 2017-06-29 | |||
| WO2011013695A1 | 2011-02-03 |
Foreign References:
| JP2017001951A | 2017-01-05 | |||
| JPH11278855A | 1999-10-12 |
Attorney, Agent or Firm:
NOMURA Ichiro (JP)
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