Title:
SILICON-BASED MICROMECHANICAL VIBRATORY GYROSCOPE WITH I-SHAPED STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2017/113911
Kind Code:
A1
Abstract:
A silicon-based micromechanical vibratory gyroscope with an I-shaped structure, which is a measuring instrument used for measuring the level of being perpendicular to a base, and consists of an upper single-crystal silicon layer, an intermediate single-crystal silicon layer, and a lower single-crystal silicon layer. The upper single-crystal silicon layer is a packaging cover plate, which is provided with signal input and output lines, of the silicon-based micromechanical gyroscope. A mechanical structure of the gyroscope is provided on the intermediate single-crystal silicon layer. The lower single-crystal silicon layer is a gyroscope substrate provided with a fixing base. The intermediate single-crystal silicon layer is sealed in a closed cavity formed by the upper single-crystal silicon layer and the lower single-crystal silicon layer. The silicon-based micromechanical vibratory gyroscope has properties of small error, high mechanical sensitivity, low vibration sensitivity, and low temperature sensitivity, and can implement motion decoupling of a driving mode and a detection mode, violent vibration, and detection output decoupling.
Inventors:
SHI QIN (CN)
QIU ANPING (CN)
XIA GUOMING (CN)
QIU ANPING (CN)
XIA GUOMING (CN)
Application Number:
PCT/CN2016/100081
Publication Date:
July 06, 2017
Filing Date:
September 26, 2016
Export Citation:
Assignee:
UNIV NANJING SCIENCE & TECH (CN)
International Classes:
G01C19/5621
Foreign References:
| CN105466406A | 2016-04-06 | |||
| CN101135559A | 2008-03-05 | |||
| CN103900548A | 2014-07-02 | |||
| CN105122003A | 2015-12-02 | |||
| US20080229824A1 | 2008-09-25 | |||
| EP1253399B1 | 2006-06-21 | |||
| EP2887013A1 | 2015-06-24 |
Attorney, Agent or Firm:
JIANGSU SHENGDIAN LAW FIRM (CN)
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