Title:
SILICON METAL OXIDE ENCAPSULATION FILM COMPRISING METAL OR METAL OXIDE IN THIN FILM, AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/184910
Kind Code:
A1
Abstract:
The present invention relates to a silicon oxide encapsulation film comprising a metal or a metal oxide, and a manufacturing method therefor. The silicon metal oxide encapsulation film according to the present invention has a high thin film growth rate and low moisture and oxygen permeabilities, thereby exhibiting a very excellent sealing effect even at a low thickness, and the stress strength and refractive index thereof can be controlled, thereby enabling a high-quality silicon metal oxide encapsulation film that is applicable to a flexible display to be readily manufactured.
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Inventors:
KIM MYOUNG WOON (KR)
LEE SANG ICK (KR)
JANG SE JIN (KR)
KIM SUNG GI (KR)
PARK JEONG JOO (KR)
CHAE WON MOOK (KR)
CHO A RA (KR)
YANG BYEONG IL (KR)
PARK JOONG JIN (KR)
PARK GUN JOO (KR)
LEE SAM DONG (KR)
LIM HAENG DON (KR)
JEON SANG YONG (KR)
LEE SANG ICK (KR)
JANG SE JIN (KR)
KIM SUNG GI (KR)
PARK JEONG JOO (KR)
CHAE WON MOOK (KR)
CHO A RA (KR)
YANG BYEONG IL (KR)
PARK JOONG JIN (KR)
PARK GUN JOO (KR)
LEE SAM DONG (KR)
LIM HAENG DON (KR)
JEON SANG YONG (KR)
Application Number:
PCT/KR2020/003156
Publication Date:
September 17, 2020
Filing Date:
March 06, 2020
Export Citation:
Assignee:
DNF CO LTD (KR)
International Classes:
H01L51/52; H01L21/02; H01L21/3065; H01L21/3213; H01L21/56; H01L51/56
Foreign References:
| KR20150125941A | 2015-11-10 | |||
| KR20170047417A | 2017-05-08 | |||
| KR20140130016A | 2014-11-07 | |||
| KR20180003287A | 2018-01-09 | |||
| US20070207696A1 | 2007-09-06 |
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
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