SILICON OXIDE PARTICLES - NANOGRAM CORP

Title:

SILICON OXIDE PARTICLES

Document Type and Number:

WIPO Patent Application WO1999061244

Kind Code:

A8

Abstract:

A collection of silicon oxide nanoparticles have an average diameter from about 5 nm to about 100 nm. The collection of silicon oxide nanoparticles effectively include no particles with a diameter greater than about four times the average diameter. The particles generally have a spherical morphology. Methods for producing the nanoparticles involve laser pyrolysis. The silicon oxide nanoparticles are effective for the production of improved polishing compositions including compositions useful for chemical-mechanical polishing.

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Inventors:

KUMAR SUJEET
BI XIANGXIN
KAMBE NOBUYUKI

Application Number:

PCT/US1999/011257

Publication Date:

March 09, 2000

Filing Date:

May 20, 1999

Export Citation:

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Assignee:

NANOGRAM CORP (US)

International Classes:

C01B33/12; C01B33/18; C09G1/02; C09K3/14; C11D3/14; C11D7/14; H01B1/06; C01B33/113; (IPC1-7): B32B19/00; B32B5/16; D02G3/00; H01B1/06; C11D65/06; C11D3/58; C11D9/00; C11D9/02; C11D9/04; C01B17/00; C01B33/00; C01B15/14; C01B33/12

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