Title:
SILICON PRECURSOR COMPOUND, COMPOSITION FOR FORMING SILICON-CONTAINING FILM, COMPRISING SAME, AND METHOD FOR FORMING SILICON-CONTAINING FILM
Document Type and Number:
WIPO Patent Application WO/2021/153986
Kind Code:
A1
Abstract:
The present application relates to a silicon precursor compound, a method for preparing the silicon precursor compound, a precursor composition for forming a silicon-containing film, the precursor composition comprising the silicon precursor compound, and a method for forming a silicon-containing film using the precursor composition.
Inventors:
KIM JIN SIK (KR)
KIM BYUNG KWAN (KR)
CHOI JUN HWAN (KR)
YU DA SOM (KR)
KIM BYUNG KWAN (KR)
CHOI JUN HWAN (KR)
YU DA SOM (KR)
Application Number:
PCT/KR2021/001084
Publication Date:
August 05, 2021
Filing Date:
January 27, 2021
Export Citation:
Assignee:
UP CHEMICAL CO LTD (KR)
International Classes:
C23C16/455; C07F7/10; C23C16/32; C23C16/34; C23C16/40
Foreign References:
| KR20180010994A | 2018-01-31 | |||
| KR20190093597A | 2019-08-09 | |||
| US20190088474A1 | 2019-03-21 | |||
| US20170348681A1 | 2017-12-07 |
Other References:
DATABASE REGISTRY 22 January 2020 (2020-01-22), ANONYMOUS: "Silanamine, N-(dimethylsilyl)-1,1-dimethyl-N-(1-pyrrolidinylsilyl)- (CA INDEX NAME)", XP055832421, retrieved from STN Database accession no. 2407719-80-4
Attorney, Agent or Firm:
MAPS INTELLECTUAL PROPERTY LAW FIRM (KR)
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