Title:
SILVER ALLOY TARGET MATERIAL, AND PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/035955
Kind Code:
A1
Abstract:
A silver alloy target material. The silver alloy target material consists of silver, indium and scandium; in the silver alloy target material, the content of indium in percentage by mass is 0.2%-1%, the content of scandium in percentage by mass is 0.005%-0.15%, and the remainder is sliver. Also disclosed are a preparation method for a sliver alloy target material, an application of the silver alloy target material in the preparation of a silver thin film, and an application of the silver alloy target material in the preparation of an ITO/Ag/ITO thin film.
Inventors:
HE WULIN (CN)
GUO WEI (CN)
GUO WEI (CN)
Application Number:
PCT/CN2022/114641
Publication Date:
March 16, 2023
Filing Date:
August 25, 2022
Export Citation:
Assignee:
HUIZHOU TOP METAL MAT CO LTD (CN)
International Classes:
C22C5/06; C23C14/14
Domestic Patent References:
| WO2006132410A1 | 2006-12-14 | |||
| WO2006132416A1 | 2006-12-14 |
Foreign References:
| CN106298118A | 2017-01-04 | |||
| JP2000226235A | 2000-08-15 |
Attorney, Agent or Firm:
HUNAN ZHAOHONG PATENT LAW OFFICE (CN)
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