Title:
SILVER-BASED CYLINDRICAL TARGET AND PROCESS FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2013/145424
Kind Code:
A1
Abstract:
This silver-based cylindrical target consists of either silver or a single-phase silver alloy in which an additive component is solid-soluted. The silver-based cylindrical target is characterized in that: in the cross section including the central axis of the cylinder, the ratio of the diameter (A) of grains in the direction along the central axis to the diameter (B) of the grains in the direction perpendicular to the central axis, namely (A)/(B) ratio, is 0.8 to 1.2; the oxygen content is 100ppm or less; and the content of nonmetallic inclusions is 20ppm or less.
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Inventors:
KOMIYAMA SHOZO (JP)
Application Number:
PCT/JP2012/079485
Publication Date:
October 03, 2013
Filing Date:
November 14, 2012
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
C23C14/34; B21C1/00; B21C23/00; B21C23/08; C22C5/06; C22F1/14; H01L51/50; H05B33/10; H05B33/26; C22F1/00
Foreign References:
JP2005036291A | 2005-02-10 | |||
JP2004084065A | 2004-03-18 | |||
JP2009512779A | 2009-03-26 | |||
JP2004339585A | 2004-12-02 | |||
JP2011100719A | 2011-05-19 | |||
JP2009512779A | 2009-03-26 | |||
JP2011100719A | 2011-05-19 | |||
JP2011162876A | 2011-08-25 |
Other References:
See also references of EP 2832895A4
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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