Title:
SIMULATED GAS GENERATOR, EVALUATION DEVICE, AND SIMULATED GAS GENERATION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/096785
Kind Code:
A1
Abstract:
Provided is a simulated gas generator that, even when switching is alternately performed between a state in which an additive gas is being added to a first gas line and a state in which the gas is being discharged to a discharge line, is capable of controlling the flow rate of the additive gas being added to the first gas line with favorable responsiveness. This simulated gas generator generates a simulated gas by adding an additive gas to a first gas and then supplies said simulated gas to a prescribed object to be evaluated, the simulated gas generator being characterized by being provided with: a first gas line through which the first gas flows; a discharge line which is for gas discharging; an additive gas line through which the additive gas flows; a switchable connection mechanism which connects the additive gas line to the first gas line or the discharge line in a switchable manner; and a pressure control mechanism which controls the pressure in the discharge line on the basis of a pressure indication value that gives an indication of the pressure in the first gas line.
Inventors:
ITAYA TAKAHIRO (JP)
Application Number:
PCT/JP2017/035249
Publication Date:
May 31, 2018
Filing Date:
September 28, 2017
Export Citation:
Assignee:
HORIBA LTD (JP)
International Classes:
B01J37/00; G01N1/00
Domestic Patent References:
| WO2012120957A1 | 2012-09-13 | |||
| WO2013057990A1 | 2013-04-25 |
Foreign References:
| JP2013134166A | 2013-07-08 | |||
| JPH11183462A | 1999-07-09 | |||
| US6047719A | 2000-04-11 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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