Title:
SIMULTANEOUS ELECTRICAL AND FLUID CONNECTION FOR ANODE
Document Type and Number:
WIPO Patent Application WO2000075401
Kind Code:
A9
Abstract:
A plating cell base design that utilizes a single connection that provides both fluid communication and electrical communication to the cell. The design eliminates many of the components previously necessary to effectuate fluid and electrical seals. With fewer connections, material cost is reduced, reliability is enhanced, and downtime is reduced.
Inventors:
STOCKBOWER DAVID WINDSOR (US)
KIMBALL PETER V (US)
GASHGAEE IRAJ (US)
KAISER GEOFFREY WAYNE (US)
KIMBALL PETER V (US)
GASHGAEE IRAJ (US)
KAISER GEOFFREY WAYNE (US)
Application Number:
PCT/US2000/014975
Publication Date:
June 20, 2002
Filing Date:
May 31, 2000
Export Citation:
Assignee:
MYKROLIS CORP (US)
STOCKBOWER DAVID WINDSOR (US)
KIMBALL PETER V (US)
GASHGAEE IRAJ (US)
KAISER GEOFFREY WAYNE (US)
STOCKBOWER DAVID WINDSOR (US)
KIMBALL PETER V (US)
GASHGAEE IRAJ (US)
KAISER GEOFFREY WAYNE (US)
International Classes:
C25D5/08; C25D17/12; (IPC1-7): C25B9/00; C25B11/00
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