Title:
SINGLE-CRYSTAL ACOUSTIC RESONATOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/143286
Kind Code:
A1
Abstract:
Provided is a bulk acoustic resonator, comprising: a substrate (100); an acoustic mirror; a bottom electrode (130); a top electrode (140); and a single-crystal piezoelectric layer (120), which is disposed between the bottom electrode (130) and the top electrode (140). A support structure (110) is disposed between the lower surface of the piezoelectric layer (120) and the upper surface of the substrate (100), the piezoelectric layer (120) being arranged roughly parallel to the substrate (100); the bottom electrode (130) and/or the top electrode (140) is a gap electrode, and the gap electrode has at least one gap layer (1305, 1405). In the thickness direction of the gap electrode, there is a distance between the gap layer (1305, 1405) and both the top surface and bottom surface of the gap electrode; and the support structure (110) comprises a recess, the bottom electrode (130) being disposed in the recess. Further provided are a filter and an electronic device.
Inventors:
ZHANG MENGLUN (CN)
PANG WEI (CN)
NIU PENGFEI (CN)
PANG WEI (CN)
NIU PENGFEI (CN)
Application Number:
PCT/CN2021/139954
Publication Date:
July 07, 2022
Filing Date:
December 21, 2021
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/15
Foreign References:
| CN111740718A | 2020-10-02 | |||
| CN111010135A | 2020-04-14 | |||
| CN111010122A | 2020-04-14 | |||
| JP3930531B1 | 2007-06-13 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
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