Title:
SINGLE CRYSTAL PIEZOELECTRIC FILM BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2020/132996
Kind Code:
A1
Abstract:
A single crystal piezoelectric film bulk acoustic resonator and a manufacturing method thereof. The manufacturing method comprises: forming a piezoelectric structure and a top electrode at a donor substrate, wherein the top electrode is arranged above the piezoelectric structure; forming a cavity and a bottom electrode at a transfer substrate, wherein the bottom electrode covers the cavity; and employing a dry transfer printing process to transfer the piezoelectric structure and the top electrode from the donor substrate to the bottom electrode. The method is easy to implement, provides a good quality single crystal piezoelectric film, and has a high production yield. The single crystal piezoelectric film bulk acoustic resonator has favorable performance.
Inventors:
PANG WEI (CN)
SUN CHONGLING (CN)
YANG QINGRUI (CN)
ZHANG MENGLUN (CN)
SUN CHONGLING (CN)
YANG QINGRUI (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2018/124077
Publication Date:
July 02, 2020
Filing Date:
December 26, 2018
Export Citation:
Assignee:
UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H01L41/35; H01L41/09; H03H9/17
Foreign References:
| US20150033520A1 | 2015-02-05 | |||
| US20150033520A1 | 2015-02-05 | |||
| JP5060356B2 | 2012-10-31 | |||
| CN109039296A | 2018-12-18 | |||
| CN108493326A | 2018-09-04 | |||
| CN106501376A | 2017-03-15 |
Attorney, Agent or Firm:
CHINA SMART INTELLECTUAL PROPERTY LTD. (CN)
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