Title:
SINTER, SPUTTERING TARGET AND MOLDING DIE, AND PRODUCTION PROCESS OF SINTER USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2006/082760
Kind Code:
A1
Abstract:
This invention provides a large sputtering target that is good in discharge properties during sputtering and properties of a thin film formed therefrom. There is also provided a production process of a sinter that can directly form a large molded product having an excellent accuracy of shape using a cold isostatic press without preforming and can produce a sinter, which can provide the above good sputtering target, at low lost with high efficiency. A sputtering target is produced using a sinter in which the content of carbon contained as an impurity has been brought to less than 0.005% by weight. The sinter is produced by molding a raw material powder directly by a cold isostatic press without adding an organic matter-containing binder and a molding aid and firing the molded product. The sinter can be produced by using a molding die having such a structure that, at the time of pressure compression, a filled raw material powder can be pressed only in a substantially monoaxial direction and, at the time of a reduction in pressure after the completion of pressing, the pressure can be released isotropically with respect to the molded product. Further, a large target in which the thickness of the erosion region has been increased can easily be produced at a high yield, contributing to improved usage of the target.
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Inventors:
Itoh, Kenichi (5-21-33, Rokkakubashi Kanagawa-ku, Yokohama-sh, Kanagawa 02, 22108, JP)
Mesuda, Masami (7-37-17, Sagamioono Sagamihara-sh, Kanagawa 03, 22808, JP)
Nagayama, Hitoshi (32 Shimosakunobe, Takatsu-ku Kawasaki-sh, Kanagawa 33, 21300, JP)
Shibutami, Tetsuo (23-4, Asahi-cho Sagamihara-sh, Kanagawa 04, 22808, JP)
Yatsunami, Shunsuke (2-3-12, Fukamachi Yamagata-sh, Yamagata 62, 99024, JP)
Mesuda, Masami (7-37-17, Sagamioono Sagamihara-sh, Kanagawa 03, 22808, JP)
Nagayama, Hitoshi (32 Shimosakunobe, Takatsu-ku Kawasaki-sh, Kanagawa 33, 21300, JP)
Shibutami, Tetsuo (23-4, Asahi-cho Sagamihara-sh, Kanagawa 04, 22808, JP)
Yatsunami, Shunsuke (2-3-12, Fukamachi Yamagata-sh, Yamagata 62, 99024, JP)
Application Number:
PCT/JP2006/301357
Publication Date:
August 10, 2006
Filing Date:
January 27, 2006
Export Citation:
Assignee:
TOSOH CORPORATION (4560, Kaisei-cho Shunan-sh, Yamaguchi 01, 74685, JP)
Itoh, Kenichi (5-21-33, Rokkakubashi Kanagawa-ku, Yokohama-sh, Kanagawa 02, 22108, JP)
Mesuda, Masami (7-37-17, Sagamioono Sagamihara-sh, Kanagawa 03, 22808, JP)
Nagayama, Hitoshi (32 Shimosakunobe, Takatsu-ku Kawasaki-sh, Kanagawa 33, 21300, JP)
Shibutami, Tetsuo (23-4, Asahi-cho Sagamihara-sh, Kanagawa 04, 22808, JP)
Yatsunami, Shunsuke (2-3-12, Fukamachi Yamagata-sh, Yamagata 62, 99024, JP)
Itoh, Kenichi (5-21-33, Rokkakubashi Kanagawa-ku, Yokohama-sh, Kanagawa 02, 22108, JP)
Mesuda, Masami (7-37-17, Sagamioono Sagamihara-sh, Kanagawa 03, 22808, JP)
Nagayama, Hitoshi (32 Shimosakunobe, Takatsu-ku Kawasaki-sh, Kanagawa 33, 21300, JP)
Shibutami, Tetsuo (23-4, Asahi-cho Sagamihara-sh, Kanagawa 04, 22808, JP)
Yatsunami, Shunsuke (2-3-12, Fukamachi Yamagata-sh, Yamagata 62, 99024, JP)
International Classes:
C23C14/34; B22F3/02; B28B3/00; C04B35/00
Attorney, Agent or Firm:
Senmyo, Kenji (Torimoto Kogyo Bldg, 38 Kanda-Higashimatsushitacho, Chiyoda-k, Tokyo 42, 10100, JP)
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