Title:
SINTERED COMPLEX OXIDE AND SPUTTERING TARGET COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2010/070832
Kind Code:
A1
Abstract:
A sintered complex oxide which contains In2Ga2ZnO7 having a homologous crystal structure, has a sintered density of 90% or greater in terms of relative density, and has an average crystal particle diameter of 10 μm or smaller.
Inventors:
YANO, Koki (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
矢野 公規 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 〒2990293, JP)
矢野 公規 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 〒2990293, JP)
Application Number:
JP2009/006596
Publication Date:
June 24, 2010
Filing Date:
December 03, 2009
Export Citation:
Assignee:
IDEMITSU KOSAN CO.,LTD. (1-1 Marunouchi 3-chome, Chiyoda-ku Tokyo, 21, 〒1008321, JP)
出光興産株式会社 (〒21 東京都千代田区丸の内三丁目１番１号 Tokyo, 〒1008321, JP)
YANO, Koki (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
出光興産株式会社 (〒21 東京都千代田区丸の内三丁目１番１号 Tokyo, 〒1008321, JP)
YANO, Koki (1280, Kamiizumi Sodegaura-sh, Chiba 93, 〒2990293, JP)
International Classes:
C04B35/00; C23C14/34; H01L21/336; H01L29/786
Attorney, Agent or Firm:
WATANABE, Kihei et al. (Shibashin Kanda Bldg. 3rd Floor, 26 Kanda Suda-cho 1-chome, Chiyoda-k, Tokyo 41, 〒1010041, JP)
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