Title:
SKIMMER CONE AND INDUCTIVELY COUPLED PLASMA MASS SPECTROMETER
Document Type and Number:
WIPO Patent Application WO/2019/202719
Kind Code:
A1
Abstract:
An inductively coupled plasma mass spectrometer 1, provided with: an ionization unit 10 for ionizing a sample by a plasma generated from raw material gas; a vacuum chamber separated into a first space 21 kept at a first pressure lower than atmospheric pressure, and second spaces 22, 24 kept at a second pressure lower than the first pressure, the second spaces 22, 24 housing a mass separator 241 for performing mass separation of ions generated in the ionization unit, and a detector 242 for detecting the ions that have passed through the mass separation unit 241; and a skimmer cone 224 provided on the first space 21 side of a partition separating the first space 21 and the second spaces 22, 24, groove parts 224a being formed in the circumferential direction on the outer circumferential surface and/or the inner circumferential surface of the skimmer cone 224.
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Inventors:
ASAHI SHINICHI (JP)
Application Number:
PCT/JP2018/016232
Publication Date:
October 24, 2019
Filing Date:
April 20, 2018
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
H01J49/04; G01N27/62
Foreign References:
JP3182750U | 2013-04-11 | |||
JP2004039313A | 2004-02-05 | |||
JPH08236066A | 1996-09-13 | |||
JPH0462749A | 1992-02-27 | |||
JPH0935681A | 1997-02-07 |
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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